YIG thin films for magneto‐optical and microwave applications

Boudiar, T.; Capraro, S.; Rouiller, T.; Blanc-Mignon, M.-F.; Payet-Gervy, Béatrice; Berre, M. Le; Rousseau, Jean‐Jacques

doi:10.1002/pssc.200405453

Cited by 24 publications

(8 citation statements)

References 9 publications

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“…Since the quartz substrate is cheaper then the GGG substrate, so we are interested to make a thin film of YIG on quartz substrate. The difficulty after heat-treatment at 740 o C to crystallize the film, is the cracks on the entire surface that are observed [7,8]. The stress during heat treatment is due to the large difference between thermal expansion coefficient of quartz and the film.…”

mentioning

confidence: 99%

Physico-chemical characterization of multilayer YIG thin film deposited by rf sputtering

Samad

Blanc-Mignon

Roumié

et al. 2010

Eur. Phys. J. Appl. Phys.

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Yttrium iron garnet (YIG) film made as a magneto-optical medium suffers from the problem of crack formation, caused by the heating process. YIG thin film is deposited by radio frequency RF magnetron sputtering; the obtained layer is amorphous and it needs annealing to be crystallized. After heat-treatment at 740 o C of the sample realized on quartz substrate, we observe cracks on the entire film surface. This is due to the large difference between the thermal expansion coefficient (5.5 x 10 -7 K -1 for quartz and 10 x 10 -6 K -1 for YIG). In this paper we present a new fabrication method to reduce this problem, we make a multilayer to obtain at the end a uniformly unique layer with excellent crystalline structure. Such films have the possibility to reach a thickness of 500 nm. YIG films have been studied by Rutherford Backscattering Spectrometry (RBS), opticEllipsometry and the Scan Electron Microscope. The RBS spectra were collected in channelling geometry with incident particles energy 2 MeV and 3.5 MeV. The thickness and the stoichiometric value of the thin films have been evaluated. Simulation of all spectra indicates a constant composition. Ellipsometry method is well adapted to model the thin film structure layers, and to measure the thickness of the film and the complex index of refraction. The theoretical ellipsometric value of the index of refraction is (2.22) while the experimental value is ranging from 2.2 to 2.3 for a wavelength of 1550nm.

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confidence: 99%

Physico-chemical characterization of multilayer YIG thin film deposited by rf sputtering

Samad

Blanc-Mignon

Roumié

et al. 2010

Eur. Phys. J. Appl. Phys.

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“…To obtain films of good qualities, all conditions and parameters concerning the background pressure, purity and flow rate of argon, the distance between the target and the substrate, the radio-frequency power of the magnetron cathode etc…, are specified in previous works [11][12][13].…”

Section: Methodsmentioning

confidence: 99%

Influence of annealing in vacuum and in air on magnetic, crystallographic and morphological properties of thin YIG films

Siblini

Khalil

Chatelon

et al. 2013

EPJ Web of Conferences

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Abstract. The Yttrium Iron Garnet (YIG) is chosen by our laboratory for the integration of passive components in the microwaves domain and for the miniaturization of integrated inductors and transformers. Magnetic and morphological characterizations are essential for the development of these components. To fabricate a micro-inductor of solenoid type, we have deposited on an alumina substrate, by RF sputtering, a thin YIG film between two layers of copper. We have also used the photolithography technique in a clean room to obtain the desired pattern of the coil. The YIG films are amorphous after deposition, the annealing at 740°C for 2 hours is necessary for them to be crystallized and to have magnetic properties. To avoid the deterioration of copper layers, the Classical Thermal Annealing (CTA) was replaced by a Vacuum Thermal Annealing (VTA). Before manufacturing the integrated inductor, it is interesting to do the magnetic, crystallographic and morphological characterizations of YIG films after annealing with both techniques of thermal treatment. To check the quality of the prototype, we have done different characterizations: VSM, Kerr effect, XRD, SEM. The results obtained with VTA were better than of CTA comparing them with bulk YIG properties.

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“…Similar results were obtained for heterostructures with the composition Y 3 Fe 5 O 12 /SiO 2 /Si (111). It should be noted that the formation of cracked grids is also fixed for films of ferrite garnets obtained by the method of magnetron sputtering on Si or quartz substrates [38,39]. In Fig.…”

Section: Film Structures Of Y 3 Fe 5 O 12 On Simentioning

confidence: 98%

Problems of Creating Materials and Film Structures Based on Ferrits for Spintronics Devices

Кецко¹,

Смирнова²,

Kopieva³

et al. 2018

RENSIT

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The review presents the main directions of the search for materials and film structures based on them for spintronics devices, provides data on materials for these purposes available in the literature. The problems that need to be solved when creating spintronics structures are analyzed. A new method for the synthesis of ferrite films on semiconductor substrates without elastic stresses and unwanted interactions of components at the interface is presented. A method for the synthesis of powdered ferrites, based on burning the gel, characterized by phase homogeneity and dimensional unimodality, which makes it possible to use the material as a target for the synthesis of films, is considered. The prospects for the practical use of submicron films of ferrite garnets with a SiO 2 buffer layer on Si with a Hilbert damping parameter α ≈ 10-3 , which can be used in spin-wave device structures on silicon substrates, are considered.

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YIG thin films for magneto‐optical and microwave applications

Cited by 24 publications

References 9 publications

Physico-chemical characterization of multilayer YIG thin film deposited by rf sputtering

Physico-chemical characterization of multilayer YIG thin film deposited by rf sputtering

Influence of annealing in vacuum and in air on magnetic, crystallographic and morphological properties of thin YIG films

Problems of Creating Materials and Film Structures Based on Ferrits for Spintronics Devices

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