Exploration of a thin YIG film‐based coplanar isolator

Capraro, S.; Boudiar, T.; Rouiller, T.; Chatelon, Jean-Pierre; Bayard, Bernard; Berre, M. Le; Payet-Gervy, Béatrice; Blanc-Mignon, M.-F.; Rousseau, Jean Jacques

doi:10.1002/mop.20339

Cited by 8 publications

(6 citation statements)

References 5 publications

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“…The CTA of YIG thin film deposited alone on an alumina substrate is properly controlled 9, 10, 20, 21. The sample is annealed for 2 h at 740 °C.…”

Section: Resultsmentioning

confidence: 99%

“…Yttrium iron garnet thin films have been chosen to be used for their integration in the microwave passive components 6–10. So, it is very important to determine their initial magnetic permeability.…”

Section: Methodsmentioning

confidence: 99%

“…Yttrium iron garnet (YIG) materials are of great interest in magneto‐optical and microwave communication industries due to their low dielectric loss, high resistivity (2.5 × 10 6 Ω m) and narrow absorption line width in the X‐band frequency range (8–12 GHz). These materials have been used in microwave circuits like resonators, isolators, and circulators 6–11. Recently, YIG films have been found to exhibit a large magneto‐optical effect and low propagation loss, which are good to be used in devices with higher quality, optical current sensors or optical magnetic field sensors 12–14.…”

Section: Introductionmentioning

confidence: 99%

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Improvement of the multilayer morphology (alumina/Cu/YIG/Cu) to characterize YIG thin film

Khalil

Siblini

Chatelon

et al. 2011

Physica Status Solidi (a)

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International audienceThe aim of our study is to characterize yttrium iron garnet (YIG) thin film for its applications in the microwaves and magnetooptical domains. For this purpose, we have manufactured a microinductor by deposition of YIG film between two copper layers on an alumina substrate. Multilayers have been deposited by radio-frequency magnetron sputtering technique. Thin films of YIG are amorphous after deposition; a post-thermal annealing at 740 8C for 2 h is necessary to obtain satisfactory magnetic properties. In this work, we have studied the effects of different parameters concerning the substrate surface state, deposition and post-thermal treatment of YIG and copper thin films on their structure and morphological properties. We have come against several mechanical and electrical problems: crack formation, detachment of YIG or Cu films from the substrate, deterioration of Cu films, open or short circuits. The roughness of alumina substrate and the annealing mode play an important role on the quality of themicroinductor prototype. After several tests by varying different parameters, we have established a protocol permitting to manufacture a prototype of good quality. This prototype is characterized using: profilometry, scanning electron microscopy, X-ray diffraction, vibrating sample magnetometry, and a precision LCR meter

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“…The CTA of YIG thin film deposited alone on an alumina substrate is properly controlled 9, 10, 20, 21. The sample is annealed for 2 h at 740 °C.…”

Section: Resultsmentioning

confidence: 99%

Section: Methodsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Improvement of the multilayer morphology (alumina/Cu/YIG/Cu) to characterize YIG thin film

Khalil

Siblini

Chatelon

et al. 2011

Physica Status Solidi (a)

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“…Our goal is to check whether the BaM films effectively exhibit the gyromagnetic properties that lead to non-reciprocal wave propagation [18][19][20]. Practically the isolator consists of a CPW patterned on the BaM film.…”

Section: Millimeter Wave Magnetic Characterizationmentioning

confidence: 99%

Microstructural and magnetic properties of thick (≥10μm) magnetron sputtered barium ferrite films

Dehlinger

Berre

Canut

et al. 2010

Journal of Magnetism and Magnetic Materials

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“…In this work, we propose the manufacturing processes of micro-integrated planar inductors with two types of magnetic core. The first one is a magnetic thin film of Yttrium Iron Garnet (YIG) deposited by RF magnetron sputtering [18,19]. The second one is a thick layer of YIG obtained by micromachining of a bulk wafer.…”

Section: Introductionmentioning

confidence: 99%

Fabrication and characterization of micro-inductors deposited on magnetic thin and thick layers

Desire

Kriga

Youssouf

et al. 2014

AEM

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This paper presents two fabrication techniques of spiral integrated inductors based on magnetic materials. For the first one, the magnetic core is a thin film deposited by RF magnetron sputtering, for the second technique the magnetic core is a thick layer of YIG obtained by micromachining. The addition of the magnetic material is expected to improve the performances of the integrated structure with electromagnetic shield. Low and high frequency equipment are used to characterize the manufactured components. A good correlation is obtained between the results by simulation and measurements for the two manufacturing techniques. These results show that the inductance increases when the thickness of the magnetic layer increases, we can double the inductance value for a thickness sufficiently high.

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Exploration of a thin YIG film‐based coplanar isolator

Cited by 8 publications

References 5 publications

Improvement of the multilayer morphology (alumina/Cu/YIG/Cu) to characterize YIG thin film

Improvement of the multilayer morphology (alumina/Cu/YIG/Cu) to characterize YIG thin film

Microstructural and magnetic properties of thick (≥10μm) magnetron sputtered barium ferrite films

Fabrication and characterization of micro-inductors deposited on magnetic thin and thick layers

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