2004
DOI: 10.1117/12.513274
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Magneto-optical properties of yttrium iron garnet (YIG) thin films elaborated by radio frequency sputtering

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Cited by 22 publications
(19 citation statements)
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“…YIG films have also been deposited on various non-garnet substrates both by PLD [10,14,15] and sputtering [16,17]. However, YIG layers grown on non-garnet substrates are generally amorphous or poly-crystalline [10,[14][15][16][17], thus requiring a further annealing step in order to improve crystallinity and optical and magnetic properties [10,16,17]. Also, very large lattice and/or thermal expansion coefficient mismatch between YIG films and non-garnet substrate can cause formation of cracks in μm-thick films during high-temperature depositions or thermal annealing [16].…”
Section: Introductionmentioning
confidence: 99%
“…YIG films have also been deposited on various non-garnet substrates both by PLD [10,14,15] and sputtering [16,17]. However, YIG layers grown on non-garnet substrates are generally amorphous or poly-crystalline [10,[14][15][16][17], thus requiring a further annealing step in order to improve crystallinity and optical and magnetic properties [10,16,17]. Also, very large lattice and/or thermal expansion coefficient mismatch between YIG films and non-garnet substrate can cause formation of cracks in μm-thick films during high-temperature depositions or thermal annealing [16].…”
Section: Introductionmentioning
confidence: 99%
“…Although widely used in optical communications, such devices are still lacking in semiconductor integrated photonic systems 1,2 because of challenges in both materials integration and device design. On the materials side, magneto-optical garnets used in discrete nonreciprocal photonic devices show large lattice and thermal mismatch with semiconductor substrates, making it difficult to achieve monolithic integration of garnets with phase purity, high Faraday rotation and low transmission loss 3,4 , and requiring wafer bonding to incorporate them on a semiconductor platform. On the device side, non-reciprocal mode conversion (NRMC) and non-reciprocal phase shift (NRPS) integrated optical isolators have large footprints with length scales from millimetres to centimetres 5,6 , which severely limits the feasibility of large-scale and low-cost integration.…”
mentioning
confidence: 99%
“…Fabrication procedures and parameters have important effects on MO properties since they determine the final stoichiometry of the materials . Postdeposition treatments and annealing at proper temperatures and durations are used to obtain desired phases and improve crystallization for better MO properties …”
Section: Magnetooptical Materialsmentioning
confidence: 99%