With the nanopositioning and nanomeasuring machine (NPM-Machine) developed at the Technische Universität Ilmenau, subnanometre resolution and nanometre uncertainty in a measuring volume of 25 × 25 × 5 mm3 have been demonstrated in the last few years. This machine allows the most various measuring problems to be solved. In practice, however, there are too many different requirements for sensing surfaces or for detecting structures. So, this paper deals with the development and also the improvement of several optical and tactile probes for application in the NPM-Machine. A focus probe with a spot size of approximately 0.5 µm, a working distance of 1.5 mm and a resolution of less than 1 nm was developed and adopted in the NPM-Machine. In the next step, the working distance was improved to exploit the full vertical range of the NPM-Machine of 5 mm. To realize tactile sensing, an atomic force probe and tactile stylus probe were developed on the basis of the focus probe. These probing systems can acquire measuring data only by scanning the surface sequentially and point-by-point. To increase data acquisition, we realized a sensor based on a white-light interference microscope and parallel sampling of 1600 × 1200 data points. First results of fringe evaluation with laser interferometer reference are presented.
Nanopositioning and nanomeasuring machines (NPM-machines), developed at Technische Universität Ilmenau, have provided high-precision measurement and positioning of objects across ten decades, from 20 pm resolution up to 200 mm measuring range. They work on the basis of the error-minimal, extended six degrees of freedom Abbe-comparator principle, with high-precision fibre-coupled laser interferometers and optical or atomic force probes. These machines are suitable not only for measuring but also for positioning with an outstanding sub-nanometre performance.
Measurements on precision step heights up to 5 mm show a repeatability of 20 pm. Consecutive step positioning of 80 pm can be demonstrated. With the new approach of an atomic clock-stabilized He–Ne-laser via a high-stable-frequency comb, we achieve a frequency stability of less than 300 Hz, respectively 0.6 ċ 10−12 relative frequency stability within 1 h at an integration time of 1 s. For the first time, we can demonstrate a direct, permanent and unbroken chain of traceability between the laser interferometric measurement within an NPM-machine and a GPS satellite-based atomic clock. This paper presents a closer insight into the scientific and metrological background as well as unrivalled measurement results, and discusses the great possibilities of this new technology.
The today’s nanometrology limits the accuracy of the precision engineering. These limits
are based on the meter definition as redefined in 1983. It is proposed to define precision mechatronics
as the science and engineering of high level precision systems and machines. The paper describes a
precision mechatronic machine. This device represents a long range positioning machine having a
resolution of 0.1 nm over the range of 25 mm x 25 mm x 5 mm. The integration of several optical and
tactile nanoprobes makes the 3D-nanopositioning suitable for various tasks. New developed
nanoprobes (optical focus probe, nanoindenter, metrological scanning force microscope) and results
of measurement will be presented.
An experimental setup for performing micro-scratching tasks and measuring the forces involved in the process is presented in this paper. The main component of the system is a multi-component force and torque sensor based on the principle of electromagnetic force compensation (EMFC). With this device it is possible to perform the micromachining process itself while simultaneously measuring the interaction forces between the tool tip and the test specimen. Experiments were performed with specimens of polished steel, silicon and glass. Planar micro-structures could be produced and tool point interaction forces in the order of some millinewtons were measured during the process.
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