Nanomeasuring and nanopositioning engineering

Jäger, Gerd; Hausotte, Tino; Manske, Eberhard; Büchner, H.-J.; Mastylo, Rostyslav; Dorozhovets, N.; Hofmann, Norbert

doi:10.1016/j.measurement.2010.04.008

Cited by 46 publications

(20 citation statements)

References 2 publications

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“…Covering a large range with linear positioning actuators needs to overcome the dynamic range either with a stepping principle with incremental steps or magnetic, voice coil actuators operating with displacement integrating the drive current. This can be considered as an equivalent to the incremental principle, extending the dynamic range without sacrificing resolution [17,18]. Even larger range systems have been designed; they can be seen as small 3D coordinate measuring systems targeting the micro-, not the nanoworld [19].…”

Section: Conceptsmentioning

confidence: 99%

Six-axis interferometric coordinates measurement system for nanometrology

et al. 2014

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We present an overview of approaches to the design of nanometrology coordinates measuring setup with a focus on methodology of nanometrology interferometric techniques and associated problems. The design and development of a nanopositioning system with interferometric multiaxis monitoring and control involved for scanning probe microscopy techniques (primarily atomic force microscopy, AFM) for detection of the sample profile is presented. Coordinate position sensing allows upgrading the imaging microscope techniques up to quantified measuring. Especially imaging techniques in the micro-and nanoworld overcoming the barrier of resolution given by the wavelength of visible light are a suitable basis for design of measuring systems with the best resolution possible. The practical measurement results of active compensation system for positioning angle errors suppression are presented as well as the analysis of overall achievable parameters. The system is being developed in cooperation with the Czech metrology institute and it is intended to operate as a national nanometrology standard combining local probe microscopy techniques and sample position control with traceability to the primary standard of length.

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Section: Conceptsmentioning

confidence: 99%

Six-axis interferometric coordinates measurement system for nanometrology

et al. 2014

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“…Similarly magnetic drives, called voice coil actuators, due to their similarity with loudspeaker principle operate with displacement integrating the drive current. This can be considered an equivalent to the incremental principle, extending the dynamic range without sacrificing resolution [19,20]. Even larger range systems have been designed, they can be seen as small 3D coordinate measuring systems targeting the micro-, not the nanoworld [21][22][23].…”

Section: Conceptsmentioning

confidence: 99%

Multiaxis interferometric displacement measurement for local probe microscopy

et al. 2011

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Ê Ú ¾ ÂÙÒ ¾¼½½ ÔØ ½¾ ÇØÓ Ö ¾¼½½ ×ØÖ ØWe present an overview of design approaches for nanometrology measuring setups with a focus on interferometry techniques and associated problems. The design and development of a positioning system with interferometric multiaxis monitoring and control is presented. The system is intended to operate as a national nanometrology standard combining local probe microscopy techniques and sample position control with traceability to the primary standard of length.

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“…8). The cantilever is fixed on a small steel plate (1). This steel plate is maintained magnetically by a small plate of brass (2) and statically determinded by three balls and three v-grooves.…”

Section: Spm-frame Modelmentioning

confidence: 99%

“…The interferometer measuring beams intersect in one virtual point. This arrangement allows a quasi Abbe offset free measurement [1], [2] . Due tasks, several probe systems were used with the NPMM, e.g.…”

Section: Introductionmentioning

confidence: 99%

Monte Carlo simulation to determine the measurement uncertainty of a metrological scanning probe microscope measurement

Kreutzer

Dorozhovets

Manske

et al. 2009

Scanning Microscopy 2009

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A proprietary metrological scanning probe microscope (SPM) with an interferometer, developed by the Institute of Process Measurement and Sensor Technology at the Ilmenau University of Technology (IPMS), is used as a stationary probe system in the nanomeasuring and nanopositioning machine (NPMM). Due to the movements of the NPMM, the total microscope measuring range is 25mm 25mm 5mm with a positioning resolution of less than 0.1nm. Examples for specimens are step height standards and one-dimensional gratings. The repeatability has been determined at less than 0.5nm for measurements on calibrated step height standards and less than 0.2nm for the gratings. The measurement results of these samples are always directly related to the corresponding measurement uncertainty, which can be calculated using an uncertainty budget. A new traceable method has been developed using a vectorial modular model. With this approach, it is possible to quickly insert new sub-models and to individually analyze their effects on the total measurement uncertainty. The analysis of these effects with regard to their uncertainties is done by Monte Carlo Simulation (MCS), because some models have partially or fully nonlinear character of which one example is the interferometer model of the metrological SPM. The complete development and analysis of these models is presented for one specific measurement task. The measurement results and the corresponding measurement uncertainty were obtained by Monte Carlo Simulation. Comparisons with the GUM have shown that the proposed procedure is a good alternative to achieve reasonable measurement results with uncertainty estimation.

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Nanomeasuring and nanopositioning engineering

Cited by 46 publications

References 2 publications

Six-axis interferometric coordinates measurement system for nanometrology

Six-axis interferometric coordinates measurement system for nanometrology

Multiaxis interferometric displacement measurement for local probe microscopy

Monte Carlo simulation to determine the measurement uncertainty of a metrological scanning probe microscope measurement

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