Over the past decade a trend of component miniaturization can be observed both in industry and in the laboratory, which involves an increasing demand for nanopositioning and nanomeasuring machines as well as for miniature tactile probes for measuring complex three-dimensional objects. The challenge is that these components—for example, diesel injectors, microgears and small optics—feature dimensions in the micrometre range with associated dimensional tolerances below 100 nm. For this reason, a significant number of research projects have dealt with microprobes for performing the dimensional measurements of microstructures with the goal of achieving measurement uncertainties in the nanometre range. This paper introduces an updated version of a 3D microprobe with an optical detection system developed at the Institute of Process Measurement and Sensor Technology. It consists of a measuring head and a separate probe system. The mechanical design of the probe system has been completely overhauled to enable the exchange of the stylus separately from the flexure elements. This is very important for the determination of the probing sphere's roundness deviations. The silicon membranes used in the first system design are therefore replaced by metal membranes. A new design of these membranes, optimized for isotropic probing forces and locking parasitic movements, is presented. Regarding the measuring head, the optical design has been redesigned to eliminate disruptive interference on the quadrant photodiode used for deflection measurement and to improve adjustment. Its dimensioning is discussed, especially the influence of the laser beam diameter on the interference contrast due to the parallel misalignment of the collimated laser beam. Initial measurement results are presented to prove functionality.
The today’s nanometrology limits the accuracy of the precision engineering. These limits are based on the meter definition as redefined in 1983. It is proposed to define precision mechatronics as the science and engineering of high level precision systems and machines. The paper describes a precision mechatronic machine. This device represents a long range positioning machine having a resolution of 0.1 nm over the range of 25 mm x 25 mm x 5 mm. The integration of several optical and tactile nanoprobes makes the 3D-nanopositioning suitable for various tasks. New developed nanoprobes (optical focus probe, nanoindenter, metrological scanning force microscope) and results of measurement will be presented.
This article discusses methods to measure samples up to 25 × 25 mm 2 using the NPMM [1] as an atomic force microscope (AFM) [2]. An entire scan at full resolution (10 nm) and 10 μm/s scan speed would take about 200 years. Therefore, overview scans with the AFM can be done to reduce the scan time, but these scans can induce aliasing artifacts due to subsampling. This paper gives a solution to that problem. The AFM camera is used for approximate orientation in the scan field. From an automatic optical area scan stitching software creates an overview image of about 2.6 GPixel with 0.5 μm resolution. The GEOtiff standard [3] is introduced to enable orientation in such big images. This format includes positioning information in the image and is used to solve the nano-orientation problem. This article further presents routines to create an overview image and a segmentation routine to detect structure domains. Since a combination of an AFM and optical scanning leads to higher positioning performance, both measurements are merged.Zusammenfassung In diesem Artikel werden Methoden zur hochauflösenden Messung von sehr großen Proben (bis zu 25 × 25 mm 2 Fläche) an der Nanopositionier-und Messmaschine [1] in Kombination mit einem Rastersondenmikroskop (AFM) [2] vorgestellt. Die geschätzte Messzeit für einen vollständigen Oberflächenscan mit einer lateralen Auflösung von 10 nm und einer Messgeschwindigkeit von 10 μm/s beläuft sich auf über 200 Jahre. Grobaufgelöste Übersichtsscans können bei der Orientierung im Messvolumen helfen, jedoch treten in Abhängigkeit von der Oberflächentopographie aufgrund der Unterabtastung AliasingStörungen in den Messdaten auf. Eine Lösung bietet die Einbeziehung der Mikroskopkamera am AFM zur Orientierung im Messvolumen. Über automatisierte Stitchingverfahren wird der komplette Messbereich in einem Übersichtsbild abgebildet. Bei einer Pixelauflösung von 0,5 μm erreicht das Übersichts-bild eine Größe von 2,6 GPixel. Die Transformationsdaten vom Bild-in das Maschinenkoordinatensystem werden über den in das Übersichtsbild integriert, um so eine Orientierung im Messbereich zu gewährleisten. Durch eine automatische Segmentierung werden zusammenhängende Regionen auf der Probe separiert, aus denen die interessanten Messbereiche nach vorgegebenen Merkmalen selektiert werden. Diese ausgewählten Bereiche können dann gezielt angefahren und hochaufgelöst mit dem AFM-Sensor gemessen werden. Die Kombination von Übersichtsbild und AFM ermög-licht eine bessere Performance zur Messung von Proben, welche aufgrund ihrer Größe nicht vollständig hochaufgelöst abgetastet werden können.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.
hi@scite.ai
10624 S. Eastern Ave., Ste. A-614
Henderson, NV 89052, USA
Copyright © 2024 scite LLC. All rights reserved.
Made with 💙 for researchers
Part of the Research Solutions Family.