New applications of the nanopositioning and nanomeasuring machine by using advanced tactile and non-tactile probes

Abstract

With the nanopositioning and nanomeasuring machine (NPM-Machine) developed at the Technische Universität Ilmenau, subnanometre resolution and nanometre uncertainty in a measuring volume of 25 × 25 × 5 mm3 have been demonstrated in the last few years. This machine allows the most various measuring problems to be solved. In practice, however, there are too many different requirements for sensing surfaces or for detecting structures. So, this paper deals with the development and also the improvement of several optical and tactile probes for application in the NPM-Machine. A focus probe with a spot size of approximately 0.5 µm, a working distance of 1.5 mm and a resolution of less than 1 nm was developed and adopted in the NPM-Machine. In the next step, the working distance was improved to exploit the full vertical range of the NPM-Machine of 5 mm. To realize tactile sensing, an atomic force probe and tactile stylus probe were developed on the basis of the focus probe. These probing systems can acquire measuring data only by scanning the surface sequentially and point-by-point. To increase data acquisition, we realized a sensor based on a white-light interference microscope and parallel sampling of 1600 × 1200 data points. First results of fringe evaluation with laser interferometer reference are presented.

Gwyddion: an open-source software for SPM data analysis

“…It allows users to perform all basic operations necessary for a successful evaluation of the data obtained using an SPM. The extensive list of features (see 3 ) contains, for example, these basic and most commonly used ones:…”

New demands on inspection planning and quality testing for micro- and nanostructured components

“…These probing systems can acquire measuring data only by scanning the surface sequentially and point-by-point. For measurements on different micro-and nanostructured step height standards uncertainties of less than 1 nm were reported [2]. The result of measurements with these sensors on smallscale coordinate measuring machines are huge 3D point cloud data.…”

“…With the nanopositioning and nanomeasuring machine developed at Ilmenau University of Technology, subnanometre resolution and nanometre uncertainty in a measuring volume of 25 × 25 × 5 mm 3 have been demonstrated in the last few years. In practice, however, there are too many different requirements for sensing surfaces or for detecting structures [2]. In order to perform 3D-coordinate measurements within the micro-and nanometre range a combination of different sensors must be utilised [3].…”

“…Solving all these various measuring tasks is not possible by means of only optical or only tactile probes. It is very important to be able to select the optimal sensor for a specific measurement task [2].…”

Dimensional metrology in the macroscopic range with sub-nanometre resolution

“…[1][2][3] These devices are able to move an object three dimensionally over a range of several millimetres. The machines can be used for positioning, probing and measuring as well as for machining and manipulation.…”