By positioning a single gold particle at different locations along the length axis on a cantilever based mass sensor, we have investigated the effect of mass position on the mass responsivity and compared the results to simulations. A significant improvement in quality factor and responsivity was achieved by operating the cantilever in the fourth bending mode thereby increasing the intrinsic sensitivity. It is shown that the use of higher bending modes grants a spatial resolution and thereby enhances the functionality of the cantilever based mass sensor.
The resonance frequency and the Q-factor of the fundamental and higher order flexural modes of silicon dioxide microcantilevers have been characterized at different pressures and for different thicknesses of gold coating. We present the experimental results and discuss the effect of the gold film on the performance and sensitivity of the cantilevers when used as mass sensors. An almost linear relationship between the Q-factor and the resonance frequency of the uncoated cantilevers is observed, implying that a higher sensitivity can be attained by actuation at higher order resonant modes. We also find that even a thin gold coating may reduce Q-factors by more than an order of magnitude.
The resonance frequency of the fundamental and four higher order modes of a silicon dioxide microcantilever is measured. The effect on these modes of depositing a 400 nm gold coating is investigated theoretically and experimentally. We derive an analytical solution to the eigenmodes of a multi-layered cantilever and verify its validity by comparison to finite-element analysis as well as the experimentally obtained results. The temperature and pressure dependence of the resonance frequencies is investigated experimentally and found to be in good agreement with theoretical models. An experimentally obtained value for the temperature dependence of Young's modulus of elasticity for thermally grown SiO2 is presented.
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