Effect of gold coating on the<i>Q</i>-factor of a resonant cantilever

Sandberg, Rasmus Kousholt; Mølhave, Kristian; Boisen, Anja; Svendsen, Winnie Edith

doi:10.1088/0960-1317/15/12/006

Cited by 98 publications

(77 citation statements)

References 18 publications

(19 reference statements)

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“…The Young's modulus for Chromium thin films Y Cr varies from 90 GPa [32,33] to 240 GPa [33,34] with Y Cr ≈ 170 GPa being the most appropriated value in our case [32]. As for deposited Gold, Y Au ≈ 75 GPa is a convergent value [33,35,36]. Given these values, the weighted average provides a Young's modulus of coating used in our experiments on both surfaces of the quartz substrates estimated by Y CrAu = 81 GPa.…”

Section: Discussionmentioning

confidence: 92%

A new method of probing mechanical losses of coatings at cryogenic temperatures

Galliou

Deléglise

Goryachev

et al. 2016

Review of Scientific Instruments

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A new method of probing mechanical losses and comparing the corresponding deposition processes of metallic and dielectric coatings in 1-100 MHz frequency range and cryogenic temperatures is presented. The method is based on the use of extremely high-quality quartz acoustic cavities whose internal losses are orders of magnitude lower than any available coatings nowadays. The approach is demonstrated for Chromium, Chromium/Gold and a multilayer tantala/silica coatings. The Ta2O5/SiO2 coating has been found to exhibit a loss angle lower than 1.6 × 10 −5 near 30 MHz at 4 K. The results are compared to the previous measurements.

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Section: Discussionmentioning

confidence: 92%

A new method of probing mechanical losses of coatings at cryogenic temperatures

Galliou

Deléglise

Goryachev

et al. 2016

Review of Scientific Instruments

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“…Observing the pressure dependency is important because of the great influence of dissipative and molecular damping on the Q factor of the cantilever. As most cantilever sensor applications require operation at atmospheric pressure, great effort has been put into describing the effect of pressure on the resonant properties of cantilevers-both experimentally [15][16][17][18][19] and theoretically. [20][21][22][23] The problem remains nontrivial though, and experimental observations are therefore of great importance for characterizing cantilever sensors.…”

Section: Verification: Resonant Properties Of Sio 2 Cantilevermentioning

confidence: 99%

Characterization system for resonant micro- and nanocantilevers

Sandberg

Boisen

Svendsen

2005

Review of Scientific Instruments

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We present a system for characterization of the resonant properties of micro- and nanocantilever sensors. The system has been constructed as a vacuum chamber with capabilities for controlling environmental conditions such as pressure, temperature, and chemical constituents. Characterization can be achieved either electrically or using a specialized laser-optical detection system. The system has been used to characterize the resonant properties of SiO2 cantilevers as well as other resonant structures. We present experimental results of a SiO2 resonant cantilever, showing an exceptional accuracy in resonant frequency determination, and demonstrating the importance of resonance characterization in a controlled environment.

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“…A reduction in Q-factor due to a metallic coating of >100 nm thick film [2] and of thinner films [3] have been reported. Another undesirable effect caused by a metallic coating is the increased low-frequency noise which often exhibits an 1/f behavior.…”

Section: Introductionmentioning

confidence: 99%

Improved atomic force microscopy cantilever performance by partial reflective coating

Schumacher¹,

Miyahara²,

Aeschimann³

et al. 2016

Nano Online

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Optical beam deflection systems are widely used in cantilever based atomic force microscopy (AFM). Most commercial cantilevers have a reflective metal coating on the detector side to increase the reflectivity in order to achieve a high signal on the photodiode. Although the reflective coating is usually much thinner than the cantilever, it can still significantly contribute to the damping of the cantilever, leading to a lower mechanical quality factor (Q-factor). In dynamic mode operation in high vacuum, a cantilever with a high Q-factor is desired in order to achieve a lower minimal detectable force. The reflective coating can also increase the lowfrequency force noise. In contact mode and force spectroscopy, a cantilever with minimal low-frequency force noise is desirable. We present a study on cantilevers with a partial reflective coating on the detector side. For this study, soft (≈0.01 N/m) and stiff (≈28 N/m) rectangular cantilevers were used with a custom partial coating at the tip end of the cantilever. The Q-factor, the detection and the force noise of fully coated, partially coated and uncoated cantilevers are compared and force distance curves are shown. Our results show an improvement in low-frequency force noise and increased Q-factor for the partially coated cantilevers compared to fully coated ones while maintaining the same reflectivity, therefore making it possible to combine the best of both worlds. 1450

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Effect of gold coating on theQ-factor of a resonant cantilever

Cited by 98 publications

References 18 publications

A new method of probing mechanical losses of coatings at cryogenic temperatures

A new method of probing mechanical losses of coatings at cryogenic temperatures

Characterization system for resonant micro- and nanocantilevers

Improved atomic force microscopy cantilever performance by partial reflective coating

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