Ultrasensitive mass sensor fully integrated with complementary metal-oxide-semiconductor circuitry

Forsén, E.; Abadal, G.; Ghatnekar-Nilsson, Sara; Teva, J.; Verd, J.; Sandberg, Rasmus Kousholt; Svendsen, Winnie Edith; Pérez‐Murano, F.; Estéve, J.; Figueras, E.; Campabadal, F.; Montelius, Lars; Barniol, N.; Boisen, Anja

doi:10.1063/1.1999838

Cited by 106 publications

(86 citation statements)

References 17 publications

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“…͓DOI: 10.1063/1.2753120͔ Cantilever-based sensors are very attractive transducers for physical, chemical, and biological sensors based on micro-/nanoelectromechanical systems 1-11 ͑NEMSs͒ due to its simplicity, wide range of sensing domains, and extremely high sensitivity when cantilever is scaled down into submicrometer scale dimensions. [6][7][8][9][10] One approach is the use of these cantilevers in dynamic mode for mass sensing applications where the mass is measured as a change of the resonance frequency. Monolithic integration of the cantileverbased transducer with readout electronics provides interesting advantages in terms of size, portability, and cost 10,11 in front of the use of optical readout techniques commonly used.…”

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“…[6][7][8][9][10] One approach is the use of these cantilevers in dynamic mode for mass sensing applications where the mass is measured as a change of the resonance frequency. Monolithic integration of the cantileverbased transducer with readout electronics provides interesting advantages in terms of size, portability, and cost 10,11 in front of the use of optical readout techniques commonly used. [2][3][4][5][6][7][8][9] In previous works, 10 a post-complementary metal-oxidesemiconductor ͑CMOS͒ fabrication process based on a combination of electron beam lithography and direct write laser lithography has been used in order to define and release the cantilever of fully integrated mass sensors.…”

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Monolithic mass sensor fabricated using a conventional technology with attogram resolution in air conditions

Verd

Uranga

Abadal

et al. 2007

Applied Physics Letters

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Monolithic mass sensors for ultrasensitive mass detection in air conditions have been fabricated using a conventional 0.35 m complementary metal-oxide-semiconductor ͑CMOS͒ process. The mass sensors are based on electrostatically excited submicrometer scale cantilevers integrated with CMOS electronics. The devices have been calibrated obtaining an experimental sensitivity of 6 ϫ 10 −11 g/cm 2 Hz equivalent to 0.9 ag/ Hz for locally deposited mass. Results from time-resolved mass measurements are also presented. An evaluation of the mass resolution have been performed obtaining a value of 2.4ϫ 10 −17 g in air conditions, resulting in an improvement of these devices from previous works in terms of sensitivity, resolution, and fabrication process complexity. © 2007 American Institute of Physics. ͓DOI: 10.1063/1.2753120͔ Cantilever-based sensors are very attractive transducers for physical, chemical, and biological sensors based on micro-/nanoelectromechanical systems 1-11 ͑NEMSs͒ due to its simplicity, wide range of sensing domains, and extremely high sensitivity when cantilever is scaled down into submicrometer scale dimensions. [6][7][8][9][10] One approach is the use of these cantilevers in dynamic mode for mass sensing applications where the mass is measured as a change of the resonance frequency. Monolithic integration of the cantileverbased transducer with readout electronics provides interesting advantages in terms of size, portability, and cost 10,11 in front of the use of optical readout techniques commonly used. [2][3][4][5][6][7][8][9] In previous works, 10 a post-complementary metal-oxidesemiconductor ͑CMOS͒ fabrication process based on a combination of electron beam lithography and direct write laser lithography has been used in order to define and release the cantilever of fully integrated mass sensors. In this letter, the mechanical structures are defined directly during the standard CMOS process used to fabricate the overall sensor ͑cantilever-based transducer plus readout circuitry ͓Fig. 1͑a͔͒, without the need of any additional lithographic process. 12 The reported results corresponding to calibration, real time mass measurements, and resolution analysis indicate the benefits in terms of resolution and operation stability of a fully integrated mass sensor operating in air conditions, which has been fabricated using a conventional CMOS technology.Cantilever structures 10 m long ͑l͒, 600 nm wide ͑w͒, and 750 nm thick ͑t͒ ͓Fig. 1͑b͔͒ have been fabricated by using the top metal layer of a commercial 0.35 m CMOS technology. 12,13 We use a three-electrode configuration constituted by the cantilever that is biased at a dc voltage ͑V dc ͒ and two electrodes for electrostatic excitation ͑V ac ͒ and capacitive readout purposes ͑V sense ͒, respectively. The cantilever displacement is detected with a full-custom designed readout CMOS circuit with a high-sensitivity and low-noise front-end stage. 14 The electrical scheme used presents an input capacitance as low as 11 fF and an input refereed noise of 21 nV/ Hz...

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Monolithic mass sensor fabricated using a conventional technology with attogram resolution in air conditions

Verd

Uranga

Abadal

et al. 2007

Applied Physics Letters

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“…However, these previously reported results were generally obtained in laboratories, with an off-sensor optical position sensing detection (PSD) of AFM mode used [11,12]. For portable bio/chemical sensing applications, there is a recent trend to integrate the sensing and actuating elements into the cantilever for onchip dynamic detection [6,13,14].…”

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Integrated MEMS/NEMS Resonant Cantilevers for Ultrasensitive Biological Detection

Gan

et al. 2009

Journal of Sensors

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Recommended by Michele PenzaThe paper reviews the recent researches implemented in Chinese Academy of Sciences, with achievements on integrated resonant microcantilever sensors. In the resonant cantilevers, the self-sensing elements and resonance exciting elements are both topdown integrated with silicon micromachining techniques. Quite a lot of effort is focused on optimization of the resonance mode and sensing structure for improvement of sensitivity. On the other hand, to enable the micro-cantilevers specifically sensitive to bio/chemical molecules, sensing materials are developed and modified on the cantilever surface with a self-assembled monolayer (SAM) based bottom-up construction and surface functionalization. To improve the selectivity of the sensors and depress environmental noise, multiple and localized surface modifications are developed. The achieved volume production capability and satisfactory detecting resolution to trace-level biological antigen of alpha-fetoprotein (AFP) give the micro-cantilever sensors a great promise for rapid and high-resoluble detection.

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“…Electronic detection relaxes the alignment requirements, but low signal levels and high sensitivity to stray and parasitic capacitance make integration of elaborate electronics and readout systems on the cantilever chip necessary. 5 In this letter we show that it is possible to detect the resonant frequency of a cantilever based sensor by measuring the time average current flowing from an electrode to the cantilever during hard contact occurring once every cycle of the cantilever vibration. The electronic detection method provides very high resolution in ambient conditions using simple low-bandwidth off-chip electronics.…”

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Cantilever based mass sensor with hard contact readout

Dohn

Hansen

Boisen

2006

Applied Physics Letters

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We present a method for microcantilever resonant frequency detection. We measure the direct current from an intermittent contact once every vibration cycle between the conducting cantilever and a counterelectrode at a low bias voltage with respect to the cantilever, while the excitation frequency and amplitude are varied. The result is an almost “digital” detection of the resonant frequency. A relative frequency resolution Δf∕f of 1∕80000 with high signal to noise ratio in ambient conditions is demonstrated. The detection method can be applied to portable sensor systems with very high frequency nanoelectromechanical cantilevers using simple off-chip electronics.

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Ultrasensitive mass sensor fully integrated with complementary metal-oxide-semiconductor circuitry

Cited by 106 publications

References 17 publications

Monolithic mass sensor fabricated using a conventional technology with attogram resolution in air conditions

Monolithic mass sensor fabricated using a conventional technology with attogram resolution in air conditions

Integrated MEMS/NEMS Resonant Cantilevers for Ultrasensitive Biological Detection

Cantilever based mass sensor with hard contact readout

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