Enhanced functionality of cantilever based mass sensors using higher modes

Dohn, Søren; Sandberg, Rasmus Kousholt; Svendsen, Winnie Edith; Boisen, Anja

doi:10.1063/1.1948521

Cited by 258 publications

(183 citation statements)

References 15 publications

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“…The theoretical framework opens the door to a novel paradigm for biological spectrometry as well as for measuring the Young's modulus of biological systems with minimal strains. We envision that the mass, position and orientation-dependent stiffness can be obtained by tracking the frequency of multiple vibration modes and solving the inverse problem 8,[10][11] . In addition, the implementation of imaging techniques that can approximately resolve the position of the adsorbate on the cantilever can simplify the problem and reduce the error in the calculations [31][32] .…”

Section: Discussionmentioning

confidence: 99%

“…We envisage a novel biological spectrometry technique based on the measurement of several vibration modes of ultrathin micro-and nanocantilevers for the identification of adsorbed biomolecules and biological systems by two coordinates: the mass [8][9][10][11] and its stiffness 1 . The use of ultrathin cantilevers with thickness below 100 nm is justified to boost the stiffness effect.…”

mentioning

confidence: 99%

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Physics of Nanomechanical Spectrometry of Viruses

Ruz¹,

Tamayo²,

Pini³

et al. 2014

Sci Rep

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There is an emerging need of nanotools able to quantify the mechanical properties of single biological entities. A promising approach is the measurement of the shifts of the resonant frequencies of ultrathin cantilevers induced by the adsorption of the studied biological systems. Here, we present a detailed theoretical analysis to calculate the resonance frequency shift induced by the mechanical stiffness of viral nanotubes. The model accounts for the high surface-to-volume ratio featured by single biological entities, the shape anisotropy and the interfacial adhesion. The model is applied to the case in which tobacco mosaic virus is randomly delivered to a silicon nitride cantilever. The theoretical framework opens the door to a novel paradigm for biological spectrometry as well as for measuring the Young's modulus of biological systems with minimal strains.I t is increasingly evident the intimate link between the mechanical properties of biological systems and its role in fundamental biological processes and disease 1 . This link spans from the molecular scale to the tissue scale. For example, the elasticity of cells has become a reliable indicator of cell transformation into cancerous or metastatic cells [2][3] . Similarly, recent reports have demonstrated the biological relevance of the mechanical properties of viruses. Viruses are able to dynamically modulate their mechanical properties in response to external forces, so as to withstand those forces or to ease cell infection 4 . For instance, in the human immunodeficiency and murine leukemia viruses, the stiffness largely decreases during the maturation process, acting as a mechanical switch for the infection process 5 . Strikingly, a single point mutation in the capsid protein of some viruses can significantly change their elasticity 6 . It is therefore fundamental the development of nanotools that enable the accurate quantification of the nanomechanical properties of single biological entities with high throughput. These tools can provide new insights on how the structural conformation, biological function, and mechanical properties of biomolecules and their hierarchical assemblies are related each other. The most prominent method to measure the mechanical properties of biological entities has been so far nanoindentation with the cantilever/tip assembly of an atomic force microscope (AFM) 7 . However, a number of challenges exist with the AFM for the quantification of the mechanical properties. Mainly, the nanoindentation curves strongly depend on the nanometer-scale geometry of the tip/sample contact, which in most of the cases cannot be controlled. Other difficulties include the contribution of the underlying substrate, the effect of adhesion, non-linear loading and the lack of accurate theoretical models.We envisage a novel biological spectrometry technique based on the measurement of several vibration modes of ultrathin micro-and nanocantilevers for the identification of adsorbed biomolecules and biological systems by two coordinates: the mass 8-11 an...

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Section: Discussionmentioning

confidence: 99%

mentioning

confidence: 99%

Physics of Nanomechanical Spectrometry of Viruses

Ruz¹,

Tamayo²,

Pini³

et al. 2014

Sci Rep

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“…This study provides deterministic information for identifying the mode sequences in multimode disk resonators, along with key characteristics of the multiple modes that are required for multimode signal processing and sensing 40 . The SiC multimode microdisks will help advance recent attempts towards multimodal sensing of individual adsorbing particles and surface adsorbates phase changes and dynamic fluctuations 24,25,41,42 , with dramatically enhanced capturing surfaces and multi-modalities. The unique transparency of SiC and its near-zero absorption of wide range in visible also make the SiC-on-SiO 2 microdisks an ideal platform for multimodal sensing in liquids 43,44 .…”

Section: Discussionmentioning

confidence: 99%

“…The tempting perspective for SiC disk resonators, however, has hitherto been much plagued by difficulties in nanomachining SiC to attain stringent device requirements (for example, a desirable radio-frequency (RF) electrostatic SiC microdisk resonator often requires very high aspect ratio coupling nanogaps and highly doped SiC layers embedded in multilayer processes, which remain very challenging for SiC today). Meantime, although the advantages of disks in area and degrees of freedom (over a beam/wire/string counterpart) promise greater functionalities in multi-and high-mode operations, progresses have been quite limited so far, often due to the lack of highly sensitive readout of high modes: even for beams/cantilevers, mostly only the few lowest modes have been well determined and used 24,25 . Fundamental issues such as identification of high modes and mode shapes, mode splitting and coupling and so on demand careful studies before we can rationally exploit them in device applications.…”

mentioning

confidence: 99%

“…These make a fascinating toolbox for exploring various resonance modes and degrees of freedom to enable new functions. Beyond the widely studied fundamental mode, higher-order modes have been pursued in cantilever and beam structures towards multimode sensing of nanoparticles and molecules (for example, simultaneously detecting mass and position of a physisorbed particle on resonator surface) 24,25 .…”

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Spatial mapping of multimode Brownian motions in high-frequency silicon carbide microdisk resonators

2014

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High-order and multiple modes in high-frequency micro/nanomechanical resonators are attractive for empowering signal processing and sensing with multi-modalities, yet many challenges remain in identifying and manipulating these modes, and in developing constitutive materials and structures that efficiently support high-order modes. Here we demonstrate high-frequency multimode silicon carbide microdisk resonators and spatial mapping of the intrinsic Brownian thermomechanical vibrations, up to the ninth flexural mode, with displacement sensitivities of B7 À 14 fm Hz À 1/2 . The microdisks are made in a 500-nm-carbide on 500-nm-oxide thin-film technology that facilitates ultrasensitive motion detection via scanning laser interferometry with high spectral and spatial resolutions. Mapping of these thermomechanical vibrations vividly visualizes the shapes and textures of high-order Brownian motions in the microdisks. Measurements on devices with varying dimensions provide deterministic information for precisely identifying the mode sequence and characteristics, and for examining mode degeneracy, spatial asymmetry and other effects, which can be exploited for encoding information with increasing complexity.

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Inverse Problems in the MEMS/NEMS Applications

Yin

2015

Materials and Failures in MEMS and NEMS

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Enhanced functionality of cantilever based mass sensors using higher modes

Cited by 258 publications

References 15 publications

Physics of Nanomechanical Spectrometry of Viruses

Physics of Nanomechanical Spectrometry of Viruses

Spatial mapping of multimode Brownian motions in high-frequency silicon carbide microdisk resonators

Inverse Problems in the MEMS/NEMS Applications

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