Temperature and pressure dependence of resonance in multi-layer microcantilevers

Sandberg, Rasmus Kousholt; Svendsen, Winnie Edith; Mølhave, Kristian; Boisen, Anja

doi:10.1088/0960-1317/15/8/011

Cited by 110 publications

(59 citation statements)

References 13 publications

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“…D F is the cantilever flexural rigidity that relates the bending moment to the change of curvature. The relation between D F and the geometry and mechanical properties of the adsorbate and cantilever is given by [17],…”

Section: Theoretical Modelmentioning

confidence: 99%

Detection of bacteria based on the thermomechanical noise of a nanomechanical resonator: origin of the response and detection limits

et al. 2007

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We have measured the effect of the bacteria adsorption on the resonant frequency of microcantilevers as a function of the adsorption position and vibration mode. The resonant frequencies were measured from the Brownian fluctuations of the cantilever tip. We found that the sign and amount of the resonant frequency change is determined by the position and extent of the adsorption on the cantilever with regard to the shape of the vibration mode. To explain these results, a theoretical one-dimensional model is proposed. We obtain analytical expressions for the resonant frequency that accurately fits the data obtained by the finite element method. More importantly, the theory data

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Section: Theoretical Modelmentioning

confidence: 99%

Detection of bacteria based on the thermomechanical noise of a nanomechanical resonator: origin of the response and detection limits

et al. 2007

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“…13 The system is easily configured for different measurement and characterization purposes, and is thus very valuable in an experimental micro-and nanomechanical research institution.…”

Section: Discussionmentioning

confidence: 99%

“…9 and 12͒, in-plane vibrating cantilever structures, and monolithic silicon dioxide cantilevers 13 For optimization of resonant cantilever sensors, the two most important parameters to control are the resonant frequency and the Q factor. The actual sensitivity of the sensor is closely related to the accuracy with which the resonant frequency can be measured, which in turn depends on the measurement system as well as the Q factor of the resonant mode.…”

Section: Verification: Resonant Properties Of Sio 2 Cantilevermentioning

confidence: 99%

Characterization system for resonant micro- and nanocantilevers

Sandberg

Boisen

Svendsen

2005

Review of Scientific Instruments

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We present a system for characterization of the resonant properties of micro- and nanocantilever sensors. The system has been constructed as a vacuum chamber with capabilities for controlling environmental conditions such as pressure, temperature, and chemical constituents. Characterization can be achieved either electrically or using a specialized laser-optical detection system. The system has been used to characterize the resonant properties of SiO2 cantilevers as well as other resonant structures. We present experimental results of a SiO2 resonant cantilever, showing an exceptional accuracy in resonant frequency determination, and demonstrating the importance of resonance characterization in a controlled environment.

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“…The pressure dependence of the resonant frequency and the quality factor of common cantilever sensors have been described in the literature [12][13][14]. However, it is not obvious whether the same theory can also be applied to the columnar sensors, because they do not obey the assumption of the cantilever model (length width thickness).…”

Section: Mechanical Characterizationmentioning

confidence: 99%

High-frequency micromechanical columnar resonators

Kehrbusch

Ilin

Bozek

et al. 2009

Science and Technology of Advanced Materials

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High-frequency silicon columnar microresonators are fabricated using a simple but effective technological scheme. An optimized fabrication scheme was invented to obtain mechanically protected microcolumns with lateral dimensions controlled on a scale of at least 1 µm. In this paper, we investigate the influence of the environmental conditions on the mechanical resonator properties. At ambient conditions, we observed a frequency stability δ f / f of less than 10 −6 during 5 h of operation at almost constant temperature. However, varying the temperature shifts the frequency by approximately −173 Hz• C −1 . In accordance with a viscous damping model of the ambient gas, we perceived that the quality factor of the first flexural mode decreased with the inverse of the square root of pressure. However, in the low-pressure regime, a linear dependence was observed. We also investigated the influence of the type of the immersing gas on the resonant frequency.

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Temperature and pressure dependence of resonance in multi-layer microcantilevers

Cited by 110 publications

References 13 publications

Detection of bacteria based on the thermomechanical noise of a nanomechanical resonator: origin of the response and detection limits

Detection of bacteria based on the thermomechanical noise of a nanomechanical resonator: origin of the response and detection limits

Characterization system for resonant micro- and nanocantilevers

High-frequency micromechanical columnar resonators

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