The current status of the development of Organic Vapor Phase Deposition technology (OVPD) for the manufacturing of OLEDs will be reviewed. The basic OVPD principle is explained and typical performance data will be presented. Starting from a small scale R&D setup, the development of larger OVPD systems up to the first mass production unit is described. Special emphasis is put on the scalability of the process. The successful up‐scaling of the OVPD principle is supported by extensive numerical modeling that is also described.
We are discussing the latest results in the field of Organic Vapor Phase Deposition (OVPD) on basis of our experimental data. In particular the use of carrier gas and its controlled mass flow are adding an additional parameter to control deposition rates in OLED manufacturing by OVPD. Many advantages offered by this key parameter in this technology like stable deposition rates, wide range of adjustable deposition rates and doping concentrations are discussed.
A small molecule hybrid OLED (SM‐HLED) consisting of a polymer layer of PEDT:PSS and two small molecule layers of α‐NPD and Alq3 was fabricated by OVPD. For this 3‐layer device we observed a turn on voltage of 2.5 V, a luminance brightness of 100 cd/m2 at 5.2 V and 300 cd/m2 at 6.5 V. Furthermore a passive matrix OLED‐display (PMOLED‐display) was demonstrated by OVPD. The display had a turn‐on voltage of about 3.0 V and showed a very homogeneous light emission.
These device characteristics confirm that OVPD is close to be comparable to Vacuum Thermal Evaporation (VTE).
The Principle of Organic Vapor Phase Deposition (OVPD) using AIXTRON's proprietary Close Coupled Showerhead technology will be presented and discussed. This alternative deposition technology enables substrate scalability and multiple layer deposition with high growth rates and high material efficiency.CFD-Simulations for the temperature distribution and the mass fraction of typically used Alq 3 reveal excellent process control required for homogeneous deposition and reproducible mass production. The actual production equipment will be discussed.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.