27.4: Modeling and Fabrication of Organic Vapor Phase Deposition (OVPD) Equipment for OLED Display Manufacturing

Abstract

The Principle of Organic Vapor Phase Deposition (OVPD) using AIXTRON's proprietary Close Coupled Showerhead technology will be presented and discussed. This alternative deposition technology enables substrate scalability and multiple layer deposition with high growth rates and high material efficiency.CFD-Simulations for the temperature distribution and the mass fraction of typically used Alq 3 reveal excellent process control required for homogeneous deposition and reproducible mass production. The actual production equipment will be discussed.

52.5L: Late‐News Paper: Versatile Evaporation Source for Large OLED Panel Manufacturing

“…Organic light emitting diode (OLED) 1 has fast developed into an important technique of choice for many flat panel display applications. As volume production becomes necessary new manufacturing techniques are being developed with the goal to achieve uniform, high rate coating over large size panels [2][3][4] . Sumitomo Corporation and SVT Associates have jointly developed an evaporation source specifically designed to address the issue of cost effective and high yield OLED production.…”

Influence of Codeposition on Methylammonium Iodide Degradation during Vapor Transport Deposition

“…2−5 One potential technique, vapor-processing, is already a familiar technology to solar cell manufacturers in CdTe and organic optoelectronic lines. 6,7 Vapor-based deposition allows for precise film thickness control and does not require hazardous solvents, enabling fabrication of complex, multilayer device structures.…”

“…As organometal halide perovskite solar cells reach power conversion efficiencies comparable to those of current market technology, researchers have begun investigating how to deposit perovskite solar cells over larger areas for manufacturing. − One potential technique, vapor-processing, is already a familiar technology to solar cell manufacturers in CdTe and organic optoelectronic lines. , Vapor-based deposition allows for precise film thickness control and does not require hazardous solvents, enabling fabrication of complex, multilayer device structures.…”

52.4: The High Deposition Rate and High Material Yield Evaporation Method for OLED Layers

“…Since the introduction of the OLED mass production systems, such as the improvement of lower throughput and lower material yield, the enlargement of the substrate and accordingly reducing cost, have been requested by the OLED makers. Several papers on the above requests were also reported [4,5,6].…”