52.3: <i>Invited Paper:</i> OLED Manufacturing by Organic Vapor Phase Deposition

Schwambera, Markus; Meyer, Nico; Gersdorff, Markus; Reinhold, Markus; Strauch, G.; Beccard, R.; Heuken, M.

doi:10.1889/1.1832551

Cited by 15 publications

(12 citation statements)

References 2 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Prior to the design of the equipment numerical CFD (Computational Fluid Dynamics)-Modeling built up the basis for the actual blueprint design. We reported on the computational modeling of the uniform and highly efficient deposition of organic thin films as well as on the thermal management of the deposition chamber earlier [4].…”

Section: Resultsmentioning

confidence: 99%

52.3: Invited Paper: OLED Manufacturing by Organic Vapor Phase Deposition

Schwambera

Meyer

Gersdorff

et al. 2003

Symp Digest of Tech Papers

Self Cite

View full text Add to dashboard Cite

The current status of the development of Organic Vapor Phase Deposition technology (OVPD) for the manufacturing of OLEDs will be reviewed. The basic OVPD principle is explained and typical performance data will be presented. Starting from a small scale R&D setup, the development of larger OVPD systems up to the first mass production unit is described. Special emphasis is put on the scalability of the process. The successful up‐scaling of the OVPD principle is supported by extensive numerical modeling that is also described.

show abstract

Section: Resultsmentioning

confidence: 99%

52.3: Invited Paper: OLED Manufacturing by Organic Vapor Phase Deposition

Schwambera

Meyer

Gersdorff

et al. 2003

Symp Digest of Tech Papers

Self Cite

View full text Add to dashboard Cite

show abstract

“…Industrial OLED manufacturing demands long term stable deposition processes so that different batches are comparable and have the same characteristics. Process controllability and short term stability for periods up to three days has been reported for BAlq, CBP, Ir(ppy) 3 and Alq 3 before [7]. We investigated the long term process stability with respect to BAlq, CBP, Alq 3 and -NPD for a period up to 30 days.…”

Section: Long Time Stability Of the Ovpd Processmentioning

confidence: 98%

“…To compete with the standard vacuum thermal evaporation (VTE) one has to prove that OVPD is more precise in process control, i.e. doping and layer thickness, has a high material yield and cost of ownership are low [3].…”

Section: Objective and Backgroundmentioning

confidence: 99%

47.2: Stable Deposition of Organic Materials for Ir-Based Red OLEDs using Organic Vapor Phase Deposition

Hartmann

Janssen

Johannes

et al. 2006

SID Symposium Digest

View full text Add to dashboard Cite

We present data on the deposition of various organic materials using Organic Vapor Phase Deposition (OVPD®) for use in efficient red OLEDs. The long term stability of the OVPD process has been investigated, showing reproducibility of deposition rates to be better than ± 1.5% for a period of up to 30 days. Due to the highly reproducible process the knowledge of the sublimation behaviour of organic materials allows precise determination of OVPD process parameters from single calibration curves as well as process transfer from R&D and Pilot Production equipment to Production equipment. A red phosphorescent OLED employing Iridium(III)bis(2‐(2′‐benzothienyl)pyridinato‐N,C3′)(acetylacetonate)(Btp2Ir(acac)) was fabricated with OVPD yielding high efficiencies.

show abstract

“…Prior to the design of the equipment numerical CFD (Computational Fluid Dynamics)-modeling built up the basis for the actual blueprint design. We reported on the computational modeling of the uniform and highly efficient deposition of organic thin films as well as on the thermal management of the deposition chamber and the OVPD technology itself earlier [1].…”

Section: General Conditionsmentioning

confidence: 99%

50.4: First Hybrid OLED by Organic Vapor Phase Deposition and Its Advantages in Deposition Rate Control for OLED Manufacturing

Hartmann

Janssen

Gersdorff

et al. 2004

Symp Digest of Tech Papers

View full text Add to dashboard Cite

We are discussing the latest results in the field of Organic Vapor Phase Deposition (OVPD) on basis of our experimental data. In particular the use of carrier gas and its controlled mass flow are adding an additional parameter to control deposition rates in OLED manufacturing by OVPD. Many advantages offered by this key parameter in this technology like stable deposition rates, wide range of adjustable deposition rates and doping concentrations are discussed. A small molecule hybrid OLED (SM‐HLED) consisting of a polymer layer of PEDT:PSS and two small molecule layers of α‐NPD and Alq3 was fabricated by OVPD. For this 3‐layer device we observed a turn on voltage of 2.5 V, a luminance brightness of 100 cd/m2 at 5.2 V and 300 cd/m2 at 6.5 V. Furthermore a passive matrix OLED‐display (PMOLED‐display) was demonstrated by OVPD. The display had a turn‐on voltage of about 3.0 V and showed a very homogeneous light emission. These device characteristics confirm that OVPD is close to be comparable to Vacuum Thermal Evaporation (VTE).

show abstract

52.3: Invited Paper: OLED Manufacturing by Organic Vapor Phase Deposition

Cited by 15 publications

References 2 publications

52.3: Invited Paper: OLED Manufacturing by Organic Vapor Phase Deposition

52.3: Invited Paper: OLED Manufacturing by Organic Vapor Phase Deposition

47.2: Stable Deposition of Organic Materials for Ir-Based Red OLEDs using Organic Vapor Phase Deposition

50.4: First Hybrid OLED by Organic Vapor Phase Deposition and Its Advantages in Deposition Rate Control for OLED Manufacturing

Contact Info

Product

Resources

About