GaAs/Al x Ga (1−x) As quantum well lasers have been demonstrated via organometallic chemical vapor deposition on relaxed graded Ge/GexSi(1−x) virtual substrates on Si. A number of GaAs/Ge/Si integration issues including Ge autodoping behavior in GaAs, reduced critical thickness due to thermal expansion mismatch, and complications with mirror facet cleaving have been overcome. Despite unoptimized laser structures with high series resistance and large threshold current densities, surface threading dislocation densities for GaAs/AlGaAs lasers on Si substrates as low as 2×106 cm−2 permitted continuous room-temperature lasing at a wavelength of 858 nm. The laser structures are uncoated edge-emitting broad-area devices with differential quantum efficiencies of 0.24 and threshold current densities of 577 A/cm2. Identical devices grown on commercial GaAs substrates showed similar behavior. This comparative data agrees with previous measurements of near-bulk minority carrier lifetimes in GaAs grown on Ge/GeSi/Si substrates.
We have determined the critical cracking thickness, or the thickness beyond which crack formation is favored, in GaAs films grown on Si and SiGe virtual substrates analytically and experimentally. The analytical model predicts a critical cracking thickness proportional to the biaxial modulus and the crack resistance of the GaAs film, and inversely proportional to the square of the thermal stress and a nondimensional crack resistance number Z. This Z number is determined by the mechanical properties of the GaAs film for a system without substrate damage, and is also determined by the mechanical properties of the substrate for a system with substrate damage. The experimentally determined critical thicknesses were in general greater than the analytically derived values due to the kinetic barriers to crack nucleation, which were not taken into consideration in the models. In addition, we have observed an asymmetric crack array formation, where arrays running in the 〈110〉 substrate off-cut direction are favored. We have also performed finite element modeling of the crack systems to study the evolution of thermal stress around crack planes in the GaAs film.
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We have fabricated a series of 256 pixel 3 256 pixel, 40 mm pitch LWIR focal plane arrays (FPAs) with HgCdTe grown on (211) silicon substrates using MBE grown CdTe and CdSeTe buffer layers. The detector arrays were fabricated using Rockwell Scientific's double layer planar heterostructure (DLPH) diode architecture. The 78 K detector and focal plane array (FPA) performance are discussed in terms of quantum efficiency (QE), diode dark current and dark current operability. The FPA dark current and the tail in the FPA dark current operability histograms are discussed in terms of the HgCdTe epitaxial layer defect density and the dislocation density of the individual diode junctions. Individual diode zero bias impedance and reverse bias current-voltage (I-V) characteristics vs. temperature are discussed in terms of the dislocation density of the epitaxial layer, and the misfit stress in the epitaxial multilayer structure, and the thermal expansion mismatch in the composite substrate. The fundamental FPA performance limitations and possible FPA performance improvements are discussed in terms of basic device physics and material properties.
It has been reported that the basic electrical properties of n-type long wave length infrared (LWIR) HgCdTe grown on silicon, including the majority carrier mobility (l e ) and minority carrier lifetime (s), are qualitatively comparable to those reported for LWIR HgCdTe grown on bulk CdZnTe by molecular beam epitaxy (MBE). Detailed measurements of the majority carrier mobility have revealed important differences between the values measured for HgCdTe grown on bulk CdZnTe and those measured for HgCdTe grown on buffered silicon substrates. The mobility of LWIR HgCdTe grown on buffered silicon by MBE is reported over a large temperature range and is analyzed in terms of standard electron scattering mechanisms. The role of dislocation scattering is addressed for high dislocation density HgCdTe grown on lattice-mismatched silicon. Differences between the low temperature mobility data of HgCdTe grown on bulk CdZnTe and HgCdTe grown on silicon are partially explained in terms of the dislocation scattering contribution to the total mobility.
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