Various material properties of the perhydropolysilazane spin-on dielectric (PHPS SOD) were examined and analyzed in this study as potential inter-layer dielectrics (ILDs) integrated for Si circuits of 30 nm technology or beyond. The spin-coated PHPS (18.5 wt%) layers converted at 650 • C showed comparable but less perfect thermal conversion to silica than the films converted at 1000 • C, however exhibiting excellent gap filling (15 nm gap opening, aspect ratio (AR) of ∼23) and planarization (degree of planarization (DOP) = ∼73% for 800 nm initial step height, cusp angle = ∼16 • ) sufficient for the Si integration. PHPS SOD layers cured at 650 • C were integrated ILDs in the 0.18 μm Si front-end-of-the-line process, and the estimated hot-carrier reliability of n-channel metal oxide semiconductor transistors (ten years at a drain voltage of 1.68 V) had no significant difference from that of the transistors integrated with the conventional borophosposilicate glass ILDs. A modified contact pre-cleaning scheme using N 2 O plasma treatment also produced uniform and stable contact chain resistances from the SOD ILDs.
A fast-response CO 2 analyzer has been developed for measuring the CO 2 concentration during transient condition of a SI engine. The analyzer consists of the non-dispersive infrared absorption method, electrical chopping system and water cooling system. The analyzer has good repeatability, linearity and permissible drift characteristic. Besides, it showed 18ms of a response to measure the CO 2 concentration. The fastresponse CO 2 analyzer was applied to a single cylinder SI engine and the CO 2 emission was examined during engine start. Simultaneously, the standard exhaust gas analyzer, which has slow response time, was used for confirming the accuracy of the exhaust gas analysis using the fast-response CO 2 analyzer. The developed analyzer showed much faster responsive characteristic than that of a standard analyzer and made cycle by cycle exhaust gas analysis possible. The transient engine operating characteristics will be estimated from the CO 2 concentration of engine-out emissions and engine operating variables.
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