Microfluidic devices with three-dimensional (3-D) arrays of microelectrodes embedded in microchannels have been developed to study dielectrophoretic forces acting on synthetic micro- and nanoparticles. In particular, so-called deflector structures were used to separate particles according to their size and to enable accumulation of a fraction of interest into a small sample volume for further analysis. Particle velocity within the microchannels was measured by video microscopy and the hydrodynamic friction forces exerted on deflected particles were determined according to Stokes law. These results lead to an absolute measure of the dielectrophoretic forces and allowed for a quantitative test of the underlying theory. In summary, the influence of channel height, particle size, buffer composition, electric field, strength and frequency on the dielectrophoretic force and the effectiveness of dielectrophoretic deflection structures were determined. For this purpose, microfluidic devices have been developed comprising pairs of electrodes extending into fluid channels on both top and bottom side of the microfluidic channels. Electrodes were aligned under angles varying from 0 to 75 degrees with respect to the direction of flow. Devices with channel height varying between 5 and 50 microm were manufactured. Fabrication involved a dedicated bonding technology using a mask aligner and UV-curing adhesive. Particles with radius ranging from 250 nm to 12 microm were injected into the channels using aqueous buffer solutions.

Hepatitis A virus particles (d = 27 nm) were successfully accumulated and trapped in a microfluidic system by means of a combination of electrohydrodynamic flow and dielectrophoretic forces. Electric fields were generated in a field cage consisting of eight microelectrodes. In addition, high medium conductance (0.3 S/m) resulted in sufficient Joule heating and the corresponding spatial variation of temperature, density, and permittivity to induce electrohydrodynamic flow in the vicinity of the field cage. Flow vortices transport particles toward the center of the field cage, where dielectrophoretic forces cause permanent entrapment and particle aggregation. Spatial distribution of temperature, density, and permittivity as well as resulting flow patterns were modeled numerically and are in good agreement with experimental results. This accumulation scheme might be applicable to sample concentration enhancement in biosensor applications.

No abstract

Microfabrication and performance of a novel microsystem for separation, accumulation and analysis of biological micro- and nanoparticles is reported. Versatile chip functions based on dielectrophoresis and microfluidics were integrated to isolate particles from complex sample solutions such as serum. A bead-based assay for virus detection is proposed. Separation of micro- and sub-mum beads employing dielectrophoretic deflector and bandpass structures is demonstrated. Individual antibody coated beads with hepatitis A virus bound to their surface were trapped by negative dielectrophoresis in a field cage and analysed by fluorescence microscopy.

A novel adhesive bonding technology has been developed based on the preparation of ultra-thin adhesive layers between precision machined cylinders and roll-to-surface print transfer onto micro-machined substrates. In contrast to many existing bonding technologies, this process is compatible with bio-functionalized devices since it operates at low temperatures and does not rely on cover plates previously pre-coated with adhesive. The process was initially developed for the bonding of glass/SU-8 structures to glass cover plates for the fabrication of micro-fluidic devices with integrated 3D-micro-electrode arrays. The precision of alignment is usually <2 µm. In addition, larger (6 inch) polymeric substrates with micro-machined channels have also been successfully bonded using this method.

We demonstrate the mapping of lateral photoexcited charge carrier density profiles in a Si wafer that is illuminated in a spot by strongly absorbed light, using an infrared camera. The radial decay measured for the charge carrier density yields information on the effective carrier lifetime. The lifetime is extracted from the infrared camera image by modeling the transport. The carrier lifetime determined with the infrared camera technique is in accord with results obtained by conventional transient microwave reflectance measurements.