This manuscript has been reproduced from the microfiim master. UMI films the text directly from the original or copy submitted. Thus, some thesis arKi dissertation copies are in typewriter face, while others may t)e from any type of computer printer.The quality of this reproduction is dependent upon the quality of the copy submitted. Broken or indistinct print, colored or poor quality illustrations and photographs, print bleedthrough, substandard margins, and improper alignment can adversely aftoct reproduction.In the unlikely event that the author dkj not send UMI a complete manuscript and there are missing pages, these will be noted. Also, if unauthorized copyright material had to be removed, a rx>te will indicate the deletk>n.Oversize materials (e.g., maps, drawings, charts) are reproduced by sectioning the original, t)eginning at the upper left-hand comer and continuing from left to right in equal sections with small overlaps.Photographs included in the original manuscript have been reproduced xerographically in this copy. Higher quality 6' x 9" black and white photographic prints are availat)le for any photographs or illustrations appearing in this copy for an additkxial charge. Contact UMI directly to order. I was fortunate to be chosen by TRDI, Japan Defense Agency, to pursue graduate study and research at the Optical Science Center (OSC) at the University of Arizona (UA). I would like to thank them for giving me the chance to conduct graduate research here at OSC.Of course, I am grateful to my husband, who is conducting his own Ph.D research at the University of Iowa, and my parents for their patience and love. Without them this work would never have come into existence.Finally, I wish to thank my former roommate, Ying, who left two kittens, DaBao and SanBao when she moved to South Carolina. The kittens have been great compan ions along with the huge mess they create every day. I will miss the kittens terribly when I go back to Japan. Wavelet transform analysis of a correlogram 54 FIGURE 2.8. Surface profiles obtained from various vertical scanning algorithms. 59 FIGURE 2.9. Number of operations required for each algorithm 62 FIGURE 2.10. Simulated correlograms of 90° scanning step with 0-10% Gaussian distribution random noise of maximum contrast 65 FIGURE 2.11. Simulated correlograms of 270° scanning step with 0-10% Gaus sian distribution random noise of maximum contrast 66 11LIST OF FIGURES-Continued FIGURE 2.12. Surface profile obtained from simulated correlograms with 6% Gaussian distribution random noise of maximum contrast 67 FIGURE 2.13. Simulated correlograms with 10% periodic motor noise 70 FIGURE 2.14. Surface profile obteiined from simulated correlograms with 10% periodic motor noise 71 The work proceeds with a discussion of the phase change upon reflection and its influence on the coherence envelope. Then phase meeisurement interferometry methods are reviewed. The emphasis is in errors in phase measurement resulting from using a white light source instead of a monochromatic light source ...

This paper describes a technique that combines ideas of phase shifting interferometry (PSI) and two-wavelength interferometry (TWLI) to extend the phase measurement range of conventional single-wavelength PSI. To verify theoretical predictions, experiments have been performed using a solid-state linear detector array to measure 1-D surface heights. Problems associated with TWLPSI and the experimental setup are discussed. To test the capability of the TWLPSI, a very fine fringe pattern was used to illuminate a 1024 element detector array. Without temporal averaging, the repeatability of measuring a surface having a sag of-100 Am is better than 25-A (0.0025%) rms.

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This paper describes a method to enhance the capability of two-wavelength phase-shifting interferometry. By introducing the phase data of a third wavelength, one can measure the phase of a very steep wave front. Experiments have been performed using a linear detector array to measure surface height of an off-axis parabola. For the wave front being measured the optical path difference between adjacent detector pixels was as large as 3.3 waves. After temporal averaging of five sets of data, the repeatability of the measurement is better than 25-Å rms (λ (λ = 6328 Å).

An interference fringe modulation skewing effect in white-light vertical scanning interferometry that can produce a batwings artifact in a step height measurement is described. The skewing occurs at a position on or close to the edge of a step in the sample under measurement when the step height is less than the coherence length of the light source used. A diffraction model is used to explain the effect.

This paper describes some practical methods to calibrate the phase shifter in phase-shifting interferometry (PSI). The phase shifter used in the experiment is a piezoelectric transducer (PZT) that has a nonlinearity of

Stylus-profiling techniques cannot be used for surface characterization of polymeric surfaces, such as magnetic tapes, because of their relatively low hardness An interferometric-optical-profiling microscope system was used to obtain high-accuracy surface profiles of magnetic media, rapidly and without physical contact with the sample. The profilometer consists of a conventional, reflection-type optical microscope with a Mirau two-beam interferometer attachment. The interference patterns of the surface can be observed through the eyepieces and can be detected with a solid-state linear array of 1024 detector elements. By translating the reference surface of the interferometer with a piezoelectric transducer while taking consecutive measurements, accurate surface-height measurements can be obtained from each detector element. The microscope system is controlled by a microcomputer, which communicates with a desk-top computer for further analysis of the surface-profile data. A computer-controlled specimen stage is added to increase the sample size. The reasons for selecting the Mirau two-beam interferometry are also discussed. Sample data of magnetic tapes are presented. Experimental data presented in the paper show that optimization of surface roughness is necessary to obtain optimum magnetic amplitude. friction, and wear properties.

Recent technological innovations have enabled the development of a new class of dynamic (vibration-insensitive) interferometer based on a CCD pixel-level phase-shifting approach. We present theoretical and experimental results for an interferometer based on this pixelated phase-shifting technique. Analyses of component errors and instrument functionality are presented. We show that the majority of error sources cause relatively small magnitude peak-to-valley errors in measurement of the order of 0.002-0.005lambda. These errors are largely mitigated by high-rate data acquisition and consequent data averaging.