Fringe modulation skewing effect in white-light vertical scanning interferometry

Harasaki, Akiko; Wyant, James C.

doi:10.1364/ao.39.002101

Cited by 159 publications

(91 citation statements)

References 15 publications

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“…11) of the interfernce ution enhancement onal white-light ults of the Linnik ose obtained by a ments provide the rly the same NA for the Mirau n of a measuring rferometer on the with a white-light ve at the top shows on. The measured high as expected reproduces the ough the batwing ecause of the small me that this effect 13 In the result of ds to an incorrect height steps of half such results are e shape of the ained correctly. If own, there is no rect.…”

Section: Profile Measuring Resultssupporting

confidence: 68%

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Low coherent Linnik interferometer optimized for use in nano-measuring machines

Niehues

Lehmann

Xie

2012

Meas. Sci. Technol.

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The precise acquisition of three-dimensional geometrical data in micro-and nanotechnology is crucial for advanced fabrication processes. Scanning white-light interferometry (SWLI) achieves nanometer resolution in the axial direction, but the lateral resolution is far more critical. The requirements for an areal measuring optical sensor in a Nano Measuring Machine are very high. The resolution in every dimension and the working distance have to be as high as possible. In contrast to a Mirau interferometer a Linnik interferometer does not need any components in front of the objective lens. This benefit permits both, a long working distance and a high lateral resolution. In the EC-funded project "NanoCMM" we developed a Linnik interferometer providing a working distance of more than 5 mm and a lateral resolution of 0.3 μm. With this interferometer we measured the full modulation depth and the rectangular shape of a pitch standard close to the Rayleigh resolution limit.

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Section: Profile Measuring Resultssupporting

confidence: 68%

“…Thus, the beam splitter cube has a high planarity and low dimensional and angular tolerances. 13 This ensures that in both arms of the interferometer the optical path lengths in glass are nearly the same. The mechanical setup has to provide a number of adjustment axes with low tolerances as shown in Fig.…”

Section: Nanocmm Setupmentioning

confidence: 99%

Low coherent Linnik interferometer optimized for use in nano-measuring machines

Niehues

Lehmann

Xie

2012

Meas. Sci. Technol.

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“…When the measurement height is identical to or lower than the wavelength of the light source, the measurement result can be distorted by diffraction at the sharp edge of the step height, as noted in earlier research by, for instance, [5]. We measured the step height standard, VLSI SHS-4500, at a height of 470.3 nm, which is quite close to the wavelength of light, with a 50X Mirau interference microscope.…”

Section: Methodsmentioning

confidence: 92%

“…Previous research related to determining of fringe order was done by [3,4], [5,6] and [7]. This work, however, yielded solutions only for limited samples.…”

Section: Introductionmentioning

confidence: 99%

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Fringe-Order Determination Method in White-Light Phase-Shifting Interferometry for the Compensation of the Phase Delay and the Suppression of Excessive Phase Unwrapping

Kim

Pahk

2013

Journal of the Optical Society of Korea

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White-light phase-shifting interferometry (WLPSI) is widely recognized as a standard method to measure shapes with high resolution over a long distance. In practical applications, WLPSI, however, is associated with some degree of ambiguity of its phase, which occurs due to a phase delay, which is the offset between the phase of the fringes and the fringe envelope peak position. In this paper, a new algorithm is proposed for the determination of a fringe order suitable for samples in which the phase delay mainly occurs due to noise, diffraction and a steep angle. The concepts of the decouple factor and the connectivity are introduced and a method for calculating the decouple factor and the connectivity is developed. With the phase-unwrapping procedure which considers these values, it is demonstrated that our algorithm determines the correct fringe order. To verify the performance of the algorithm, a simulation was performed with the virtual step height under noise. Some specimens such as step height standard and a column spacer with a steep angle are also measured with a Mirau interference microscope, after which the algorithm is shown to be effective and robust.

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White Light Interferometry

Schmit¹,

Pakuła²

2019

Handbook of Advanced Nondestructive Evaluation

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Fringe modulation skewing effect in white-light vertical scanning interferometry

Cited by 159 publications

References 15 publications

Low coherent Linnik interferometer optimized for use in nano-measuring machines

Low coherent Linnik interferometer optimized for use in nano-measuring machines

Fringe-Order Determination Method in White-Light Phase-Shifting Interferometry for the Compensation of the Phase Delay and the Suppression of Excessive Phase Unwrapping

White Light Interferometry

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