1985
DOI: 10.1364/ao.24.001489
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Measurement of surface topography of magnetic tapes by Mirau interferometry

Abstract: Stylus-profiling techniques cannot be used for surface characterization of polymeric surfaces, such as magnetic tapes, because of their relatively low hardness An interferometric-optical-profiling microscope system was used to obtain high-accuracy surface profiles of magnetic media, rapidly and without physical contact with the sample. The profilometer consists of a conventional, reflection-type optical microscope with a Mirau two-beam interferometer attachment. The interference patterns of the surface can be … Show more

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Cited by 221 publications
(86 citation statements)
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“…4 Researchers have also developed methods to experimentally evaluate the real area of contact using, for example, contact resistance, 29 ultrasonic, 30,31 or optical methods. 32 However, experimental determination of the real area of contact in various systems still remains nontrivial. The real area of contact can also be estimated using contact mechanics models that build upon Hertz, 4 Johnson-KendallRoberts ͑JKR͒, 33 Derjaguin-Muller-Toporov ͑DMT͒, 34 or Maugis 35 mechanics.…”
Section: B Acl and Real Area Of Contact At Low Loadsmentioning
confidence: 99%
“…4 Researchers have also developed methods to experimentally evaluate the real area of contact using, for example, contact resistance, 29 ultrasonic, 30,31 or optical methods. 32 However, experimental determination of the real area of contact in various systems still remains nontrivial. The real area of contact can also be estimated using contact mechanics models that build upon Hertz, 4 Johnson-KendallRoberts ͑JKR͒, 33 Derjaguin-Muller-Toporov ͑DMT͒, 34 or Maugis 35 mechanics.…”
Section: B Acl and Real Area Of Contact At Low Loadsmentioning
confidence: 99%
“…7 A reflection blazed grating was adopted in our system. In normal applications of the blazed grating, the diffraction angle should be equal to the incidence angle so as to obtain the maximum efficiency, that is: α=β=θ, where θ is the blazed angle.…”
Section: Wavelength-to-spatial Scanning By Two Dispersive Componentsmentioning
confidence: 99%
“…The fabrication of integrated circuits and MST/MEMS devices is now a mature technology in many senses, however their broad use across a number of sectors has highlighted one of the problems of micro and nano scalar manufacture namely, large region surface measurement (for form and waviness) and fast quality control in the production field [4][5][6][7][8].…”
Section: Introductionmentioning
confidence: 99%
“…In the case of white light, interference occurs only when the optical path difference (OPD) between the objective and reference beams is nearly the same (within the coherence length of the light source) so by varying one of the arms we can measure the surface roughness, small height variations and thickness of the microstructures. various schemes in WLI, such as, vertical scanning interferometry (VSI) [16,17], phase shifting interferometry (PSI) [18][19][20][21][22], fringe projection method [23][24][25][26][27], Fourier profilometry [27,28], confocal microscope [29]. In the aforementioned methods Linnik, Michelson and Mirau type interferometric objectives are used [12][13][14].…”
Section: Introductionmentioning
confidence: 99%