Single Shot White Light Interference Microscopy for 3D Surface Profilometry Using Single Chip Color Camera

Abstract

We present a single shot low coherence white light Hilbert phase microscopy (WL-HPM) for quantitative phase imaging of Si opto-electronic devices, i.e., Si integrated circuits (Si-ICs) and Si solar cells. White light interferograms were recorded by a color CCD camera and the interferogram is decomposed into the three colors red, green and blue. Spatial carrier frequency of the WL interferogram was increased sufficiently by means of introducing a tilt in the interferometer. Hilbert transform fringe analysis was used to reconstruct the phase map for red, green and blue colors from the single interferogram. 3D step height map of Si-ICs and Si solar cells was reconstructed at multiple wavelengths from a single interferogram. Experimental results were compared with Atomic Force Microscopy and they were found to be close to each other. The present technique is non-contact, full-field and fast for the determination of surface roughness variation and morphological features of the objects at multiple wavelengths.

A review of interferometry for geometric measurement

“…3D image stitching methods are used to enlarge the lateral measuring range [186,187], and this technique is discussed in section 4.2.4. The combination of WLI with a color CCD camera has also been a research hotspot in recent years, which makes the MWI as simple as the one single wavelength case [188][189][190][191].…”

High‐resolution single‐shot phase‐shifting interference microscopy using deep neural network for quantitative phase imaging of biological samples

“…Although PSI has the advantage of utilizing the full resolution of the system, requirement of multiple frames is the key obstacle in PSI for many applications such as live-cell imaging and measurement with dynamic samples [22]. To overcome these limitations, various singleshot phase-shifting approaches have been developed in the recent past [13,[23][24][25][26]. However, these approaches either suffer with complex experimental setups while using multiple charge couple device (CCD) cameras or significantly increases the cost of the system [17,23,26].…”

“…Therefore, various single-shot phase-shifting approaches have been developed in the past. [17][18][19] These approaches suffer with complex experimental setups while using multiple CCD camera, and significantly increases the cost of the system. Other, approached such as using polarizer array for phase shifting purpose leads inefficient utilization of the CCD chip.…”