A superconductor circuit based on series MicroElectro-Mechanical (MEM) switches is utilized to switch between two bandpass hairpin filters with 200 MHz bandwidth and nominal center frequencies of 2.1 GHz and 2.6 GHz. This is accomplished using 4 switches actuated in pairs, one pair at a time. When one pair is actuated the first bandpass filter is coupled to the input and output ports. When the other pair is actuated the second bandpass filter is coupled to the input and output ports, thus corresponding output responses are obtained.The device is made of YBa 2 Cu 3 O 7 thin film deposited on a 20 mm 20 mm LaAlO 3 substrate by pulsed laser deposition. BaTiO 3 deposited by RF magnetron sputtering is utilized as the insulation layer at the switching points of contact. Fabrication details are discussed along with simulation data and test results.
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We have produced high quality superconducting half-wave microwave resonators on YBCO/YSZ/Si heterostructures. The YSZ was grown on (100) Si by pulsed dc magnetron sputtering at 820°C in 37 mTorr Ar/O 2. YBCO was then deposited on the YSZ/Si by pulsed laser ablation at 760°C in 0.5 Torr of O 2. A coplanar meander-line structure was patterned and its microwave characteristics measured. The results indicate Si to be a definite candidate for microwave applications producing Q values exceeding 50,000 at 4 GHz for T < 30 K. The microwave properties compare favorably to those obtained from identical resonators patterned on normal metal and YBCO/LaAlO 3 at 30 K.
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