Effectiveness of BaTiO3 dielectric patches on YBa2Cu3O7 thin films for MEM switches

Vargas, J.M.; Hijazi, Y.; Noel, Julien; Vlasov, Yuriy; Larkins, G.L.

doi:10.1088/1742-6596/507/4/042045

Cited by 1 publication

(1 citation statement)

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“…Stress, Young's modulus, Poisson's ratio, and shear strength are important parameters to understand for devices characterisation and optimisation of their performance [13]. In addition, understanding the effects of cryogenic temperatures and systems operation over large temperature variations and its performance is an area of increasing importance to designers as they integrate switches into various subsystems where materials reliability is very important [15][16][17][18][19][20].…”

Section: Review Articlementioning

confidence: 99%

Review of the properties of gold material for MEMS membrane applications

Noel¹

2016

IET Circuits, Devices & Systems

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Materials selection for radio frequency (RF) microelectromechanical (MEM) switches application is important for overall design and fabrication of devices. The processing techniques and microstructures of the materials in these devices differ from the techniques used in bulk structures. Although the properties and morphology of a bulk material may be well characterised, thin film materials have properties substantially different. MEM switches for RF and cryogenic applications has been developed where the switch is integrated in a coplanar waveguide on a LaAlO 3 substrate as structure with a gold membrane bridge suspended above an area of the centre superconductor (YBa 2 Cu 3 O 7) covered with a BaTiO 3 dielectric. The gold (Au) membrane is actuated by the electrostatic attractive force acting between transmission line and the membrane when a dc control voltage is applied. The value of the actuation force greatly depends on the geometry and mechanical properties of the bridge material. A summary and review of the state-of-the-art in MEM switches using Au membrane elements is presented and its application for cryogenic temperature is discussed.

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Section: Review Articlementioning

confidence: 99%

Review of the properties of gold material for MEMS membrane applications

Noel¹

2016

IET Circuits, Devices & Systems

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Effectiveness of BaTiO₃ dielectric patches on YBa₂Cu₃O₇ thin films for MEM switches

Cited by 1 publication

References 3 publications

Review of the properties of gold material for MEMS membrane applications

Review of the properties of gold material for MEMS membrane applications

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