Laser Ablated and RF Sputtered BaTiO3 Thin Films for Use in Superconducting RF MEM Switches

Hijazi, Y.; Bogozi, A.; Brzhezinskaya, M. M.; Martínez, José A.; Noel, Julien; Hanna, Drayton; Lawrence, L.G.; Fairweather, Dane; Kennedy, R. J.; Stampe, P. A.; Vargas, J.M.; Vlasov, Yu. A.; Larkins, G.L.

doi:10.1063/1.1774638

Cited by 4 publications

(3 citation statements)

References 2 publications

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“…5. Discussion of experimental procedure and specific details of microwave behavior of the transmission line was given in [5]- [7]. In this work, the actuation voltage of the switch was measured to be 130-135 V at , which is slightly higher than reported in [5].…”

Section: Resultsmentioning

confidence: 97%

“…Work of this kind has not been reported yet. The RF MEM switches discussed in this work use a hightemperature superconductor (HTS) coplanar waveguide (CPW) transmission line fabricated from , covered by a thin dielectric patch just under the Au bridge [5]. The dielectric provides a capacitive path for the RF signal while avoiding short circuiting of the transmission line to ground [6].…”

Section: Introductionmentioning

confidence: 99%

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Elastic Modulus Study of Gold Thin Film for Use as an Actuated Membrane in a Superconducting RF MEM Switch

Bogozi

Datye

Brzhezinskaya

et al. 2005

IEEE Trans. Appl. Supercond.

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In earlier work a capacitively shunted superconducting MicroElectroMechanical (MEM) switch was designed and fabricated. The switch is composed of a superconducting YBa 2 Cu 3 O 7 coplanar waveguide structure with a Au bridge membrane suspended above an area of the center conductor covered with BaTiO 3 dielectric. The Au membrane is actuated by the electrostatic attractive force acting between transmission line and the membrane when voltage is applied. The value of the actuation force will greatly depend on the geometry and mechanical properties of the bridge material. Since Young's modulus characterizes the elastic properties of a material which is temperature dependent, it is important to find the effect of low temperature especially below the transition temperature of the superconductor in order to better understand the switch operation. Our results show that the elastic modulus for Au thin film at cryogenic temperature is 470 times bigger than it is at room temperature.

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Section: Resultsmentioning

confidence: 97%

Section: Introductionmentioning

confidence: 99%

Elastic Modulus Study of Gold Thin Film for Use as an Actuated Membrane in a Superconducting RF MEM Switch

Bogozi

Datye

Brzhezinskaya

et al. 2005

IEEE Trans. Appl. Supercond.

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“…Stress, Young's modulus, Poisson's ratio, and shear strength are important parameters to understand for devices characterisation and optimisation of their performance [13]. In addition, understanding the effects of cryogenic temperatures and systems operation over large temperature variations and its performance is an area of increasing importance to designers as they integrate switches into various subsystems where materials reliability is very important [15][16][17][18][19][20].…”

Section: Review Articlementioning

confidence: 99%

Review of the properties of gold material for MEMS membrane applications

Noel¹

2016

IET Circuits, Devices & Systems

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Materials selection for radio frequency (RF) microelectromechanical (MEM) switches application is important for overall design and fabrication of devices. The processing techniques and microstructures of the materials in these devices differ from the techniques used in bulk structures. Although the properties and morphology of a bulk material may be well characterised, thin film materials have properties substantially different. MEM switches for RF and cryogenic applications has been developed where the switch is integrated in a coplanar waveguide on a LaAlO 3 substrate as structure with a gold membrane bridge suspended above an area of the centre superconductor (YBa 2 Cu 3 O 7) covered with a BaTiO 3 dielectric. The gold (Au) membrane is actuated by the electrostatic attractive force acting between transmission line and the membrane when a dc control voltage is applied. The value of the actuation force greatly depends on the geometry and mechanical properties of the bridge material. A summary and review of the state-of-the-art in MEM switches using Au membrane elements is presented and its application for cryogenic temperature is discussed.

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Study of non-centrosymmetric to centrosymmetric structural transformation in Zr-doped Barium Titanate

Islam

Ghosh

2020

Phase Transitions

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Laser Ablated and RF Sputtered BaTiO3 Thin Films for Use in Superconducting RF MEM Switches

Abstract: Articles you may be interested inEffect of oxygen vacancy on the dielectric relaxation of BaTiO3 thin films in a quenched state Ferroelectric relaxor behavior and microwave dielectric properties of Ba ( Zr 0.3 Ti 0.7 ) O 3 thin films grown by radio frequency magnetron sputtering

Cited by 4 publications

References 2 publications

Elastic Modulus Study of Gold Thin Film for Use as an Actuated Membrane in a Superconducting RF MEM Switch

Elastic Modulus Study of Gold Thin Film for Use as an Actuated Membrane in a Superconducting RF MEM Switch

Review of the properties of gold material for MEMS membrane applications

Study of non-centrosymmetric to centrosymmetric structural transformation in Zr-doped Barium Titanate

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