Elastic Modulus Study of Gold Thin Film for Use as an Actuated Membrane in a Superconducting RF MEM Switch

Bogozi, A.; Datye, Amit; Brzhezinskaya, M. M.; Hijazi, Y.; Martínez, José A.; Noel, Julien; Wu, Kai–Chiang; Vlasov, Yu. A.; Larkins, G.L.

doi:10.1109/tasc.2005.850157

Cited by 15 publications

(8 citation statements)

References 12 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The stress-induced damage morphologies are rarely observed in experiments. This is because that the metal elasticity modulus will decrease significantly as its temperature rises under actual circumstances [24,25]. The thermal stress in gratings in actual cases will not be as high as theoretical values.…”

Section: Experimental Results Discussionmentioning

confidence: 96%

Varied laser induced damage phenomena of gold coated gratings for pulse compression

Xia

Huang

Kong

et al. 2017

Optics and Lasers in Engineering

View full text Add to dashboard Cite

In this paper, gold-coated gratings for pulse compression have been prepared and their laser damage experiments have been performed. Varied laser damage morphologies have been observed: when a 60fs-pulsed laser with energy density slightly higher than the damage threshold was used, damage morphology with a characteristic of discrete distribution of small pits was appeared. These damage pits are linearly distributed at the junction of ridges and grooves. If the laser energy density is much higher than the damage threshold, the gold films was overall ablated and the grating structure disappeared. Besides, if the gold film has poor adhesion, it was peeled off. When a 450ps-pulsed laser with energy density slightly higher than the damage threshold was used, part of grating ridges will be ablated and an obvious line exists between the ablated area and the unchanged area. In theory, the laser induced temperature field and stress field in gold-coated gratings were calculated based on the electromagnetic field using the finite element method. It is demonstrated that the temperature and thermal stress distribution characteristics are affected by the laser heating rate and the heat diffusion time (the calculated diffusion time ranges from 6fs to 450ps), which determines the laser damage characteristics. The possible damage drivers have electron hydrodynamic pressure, thermal ablation and thermal stress.

show abstract

Section: Experimental Results Discussionmentioning

confidence: 96%

Varied laser induced damage phenomena of gold coated gratings for pulse compression

Xia

Huang

Kong

et al. 2017

Optics and Lasers in Engineering

View full text Add to dashboard Cite

show abstract

“…Stress, Young's modulus, Poisson's ratio, and shear strength are important parameters to understand for devices characterisation and optimisation of their performance [13]. In addition, understanding the effects of cryogenic temperatures and systems operation over large temperature variations and its performance is an area of increasing importance to designers as they integrate switches into various subsystems where materials reliability is very important [15][16][17][18][19][20].…”

Section: Review Articlementioning

confidence: 99%

Review of the properties of gold material for MEMS membrane applications

Noel¹

2016

IET Circuits, Devices & Systems

View full text Add to dashboard Cite

Materials selection for radio frequency (RF) microelectromechanical (MEM) switches application is important for overall design and fabrication of devices. The processing techniques and microstructures of the materials in these devices differ from the techniques used in bulk structures. Although the properties and morphology of a bulk material may be well characterised, thin film materials have properties substantially different. MEM switches for RF and cryogenic applications has been developed where the switch is integrated in a coplanar waveguide on a LaAlO 3 substrate as structure with a gold membrane bridge suspended above an area of the centre superconductor (YBa 2 Cu 3 O 7) covered with a BaTiO 3 dielectric. The gold (Au) membrane is actuated by the electrostatic attractive force acting between transmission line and the membrane when a dc control voltage is applied. The value of the actuation force greatly depends on the geometry and mechanical properties of the bridge material. A summary and review of the state-of-the-art in MEM switches using Au membrane elements is presented and its application for cryogenic temperature is discussed.

show abstract

“…According to Bogozi et al 31 the force necessary to actuate the switch greatly depends on the properties of material from which the cantilever beam is made and on the physical parameters of the switch. This dependence has not widely been studied but existing results prove that temperature should affect the switch actuation.…”

Section: ͒mentioning

confidence: 99%

Contact voltage-induced softening of RF microelectromechanical system gold-on-gold contacts at cryogenic temperatures

Berman

Walker

Krim

2010

Journal of Applied Physics

View full text Add to dashboard Cite

A series of experiments were performed in vacuum environments to investigate the impact of rf micromechanical system switch contact voltage versus resistance for gold-on-gold contacts at cryogenic temperatures. The purpose of this work was twofold as follows: ͑1͒ to examine whether asperity heating models already validated for high temperature contacts were also applicable at cryogenic temperatures and ͑2͒ to explore the implications and validity of prior suggestions that contact temperatures between 338 and 373 K are high enough to dissociate adsorbed film and/or push them aside but low enough to prevent asperities from becoming soft and adherent. Measurements on two distinct switch types, fabricated at independent laboratories, were performed in the temperature range 79-293 K and for contact voltages ranging from 0.01 to 0.13 V. Contact resistance values at all temperatures were observed to be lower for higher contact voltages, consistent with the aforementioned asperity heating models, whereby increased contact currents are associated with increased heating and softening effects. In situ removal of adsorbed species by oxygen plasma cleaning resulted in switch adhesive failure. Switches that had not been cleaned meanwhile exhibited distinct reductions in resistance at contact temperatures close to 338 K, consistent with suggestions that films begin to desorb, disassociate, and/or be pushed aside at that temperature.

show abstract

Elastic Modulus Study of Gold Thin Film for Use as an Actuated Membrane in a Superconducting RF MEM Switch

Cited by 15 publications

References 12 publications

Varied laser induced damage phenomena of gold coated gratings for pulse compression

Varied laser induced damage phenomena of gold coated gratings for pulse compression

Review of the properties of gold material for MEMS membrane applications

Contact voltage-induced softening of RF microelectromechanical system gold-on-gold contacts at cryogenic temperatures

Contact Info

Product

Resources

About