Design and Fabrication of Two Switch Superconducting Microstrip Hairpin Filters Using Series MEMS Switches

Abstract

A superconductor circuit based on series MicroElectro-Mechanical (MEM) switches is utilized to switch between two bandpass hairpin filters with 200 MHz bandwidth and nominal center frequencies of 2.1 GHz and 2.6 GHz. This is accomplished using 4 switches actuated in pairs, one pair at a time. When one pair is actuated the first bandpass filter is coupled to the input and output ports. When the other pair is actuated the second bandpass filter is coupled to the input and output ports, thus corresponding output responses are obtained.The device is made of YBa 2 Cu 3 O 7 thin film deposited on a 20 mm 20 mm LaAlO 3 substrate by pulsed laser deposition. BaTiO 3 deposited by RF magnetron sputtering is utilized as the insulation layer at the switching points of contact. Fabrication details are discussed along with simulation data and test results.

Silicon comb-drive actuators for low-temperature tuning of superconducting microwave circuits

“…In 2003, Hijazi et al demonstrated a superconducting RF MEMS switch [5], the group has since published over ten papers on the subject. They have recently demonstrated a filter that switches from 2.1 GHz to 2.6 GHz using four metal MEMS switches [6]. These devices use an electrostatically actuated, thin film gold membrane to form the switch.…”

Review of the properties of gold material for MEMS membrane applications

“…The switch fabrication process is described in detail in [58][59][60][61]. After the full fabrication cycle, the device was mounted onto an aluminium test fixture where connectors make contact with the device ports using indium and is connected to the testing system.…”

Oxygen plasma etching of hydrocarbon‐like polymers: Part II experimental validation

“…In this experimental study, three polymers with different physicochemical properties have been investigated in order to ascertain the universal nature of the model developed for the etching of polymers in oxygen plasmas. For practical reasons (availability, implementation means, standard recipes and procedures, characterization), the choice was made on resins (see Table ) commonly used in microelectronics (AZ 5214 and AZ 1518) or in MEMS (micro‐electro‐mechanical systems) manufacturing processes (SU‐8 2002) …”