Silicon comb-drive actuators for low-temperature tuning of superconducting microwave circuits

Prest, M. J.; Wang, Yi; Huang, F.; Lancaster, M.J.

doi:10.1088/0960-1317/18/12/125003

Cited by 5 publications

(15 citation statements)

References 14 publications

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“…The frequency variation is dependent upon the permittivity of the silicon (a value of 11.9 has been used in the simulations). The tuning range is greater than that of our previously reported horizontal tuner [1], which had a simulated variation from 6.075 GHz to 5.699 GHz (6.2%) and a measured variation of 4.6% with a 40 m horizontal movement. The quality factor of the horizontal tuner was about 300 and almost independent of resonator frequency.…”

Section: Tuning Principlecontrasting

confidence: 61%

“…We have previously demonstrated this hybrid technology using a silicon comb-drive horizontal actuator [1]. In the present work we demonstrate an alternative actuator with improved tuning range and reliability.…”

Section: Introductionmentioning

confidence: 82%

“…Because of this large difference in expansion coefficients and the high Young"s modulus of the materials, differential expansion and contraction would cause large forces during thermal cycling between room temperature and 77 K. We therefore employed compliant support springs as introduced in our previous publication [1]. Fig.…”

Section: Fabricationmentioning

confidence: 99%

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Tuning of a superconducting microwave resonator at 77 K using an integrated micromachined silicon vertical actuator

Prest

Wang

Huang

et al. 2010

J. Micromech. Microeng.

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Abstract.A silicon micromachined actuator is used to tune a high temperature superconducting microwave resonator. The superconducting resonator is only 1.24 mm by 0.66 mm and demonstrates a Q of up to 1078 at 6.3 GHz and at 77 K. A tuning range of 12% is demonstrated with a maximum applied voltage of 40 V. The frequency of the resonator is controlled by the proximity of a silicon tuning probe. The room temperature resistivity of the silicon is measured to be 20 cm; this value drops as the device is cooled, but remains the limiting factor in the quality factor of the device. This proof of principle experiment demonstrates the application of silicon micromachining for tuning of superconducting microwave circuits; which is achieved despite the difficulties presented by differing material properties and thermal constraints when cooling to 77 K.

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Section: Tuning Principlecontrasting

confidence: 61%

Section: Introductionmentioning

confidence: 82%

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Tuning of a superconducting microwave resonator at 77 K using an integrated micromachined silicon vertical actuator

Prest

Wang

Huang

et al. 2010

J. Micromech. Microeng.

Self Cite

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“…Filter parameters like center frequency or bandwidth can be controlled continuously, discretely, or a combination of both. Continuously tuned filters have been implemented using varactor diodes [9][10][11][12][13][14][15], MEMS varactors [16][17][18][19][20], or ferroelectric materials [21][22][23][24]. On the other hand, discretely tuned filters have been implemented using PIN diodes [25][26][27][28][29][30][31] or MEMS switches [32][33][34].…”

Section: Introductionmentioning

confidence: 99%

Fully adaptable band‐stop filter using varactor diodes

Musoll-Anguiano

Llamas-Garro

Brito‐Brito

et al. 2010

Micro & Optical Tech Letters

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In this article a reconfigurable band-stop filter able to reconfigure center frequency, bandwidth, and selectivity for fine tuning applications is demonstrated, device topology discussion and implementation details are given, and followed by discussion on simulations and measurements. The reconfigurable filter topology has four poles and a quasi-elliptic band-stop filter response. The device is tuned by varactor diodes placed at different locations on the filter; varactors are voltage controlled in pairs due to filter symmetry for center frequency and bandwidth control. An additional varactor is placed on a crossing line to move a pair of transmission zeros, closer or farther to the filter center frequency, which tunes filter selectivity. Simulations show a tuneable center frequency range from 1.42 to 1.48 GHz, a tuneable fractional bandwidth range from 9.46 to 12.96%, and a tuneable selectivity range from 0.53 to 0.65 dB/MHz. Measurements show a tuneable center frequency range from 1.37 to 1.43 GHz, a tuneable fractional bandwidth range from 11.31 to 15.93%, and a selectivity tuning range from 0.37 to 0.40 dB/MHz. Simulations and measurements are in good agreement.

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“…Various successes have been achieved. Previously we investigated a silicon dielectric-tuner by integrating silicon MEMS actuators with HTS resonators [5,6]. A comb-drive actuated horizontal tuner was first demonstrated in [5].…”

mentioning

confidence: 99%

Cryogenic performance of micromachined silicon rocking actuator for tuning a superconducting resonator

Wang¹,

Prest²,

Lancaster³

2010

Electron. Lett.

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A micromachined silicon rocking actuator is used to tune a high temperature superconducting resonator. Its performance at cryogenic temperatures from 77 to 30 K is studied. A significant increase in the quality factor of the resonator, from 376 to 13876, is observed. It is confirmed that the change in resistance of the silicon tuning probe with temperature is the main factor responsible for the improvement. At low temperature, the silicon becomes an excellent dielectric, which makes it a good material for low-loss tuners.Introduction: High temperature superconductor (HTS) resonators exhibit very high quality-factors (Q-factor) at cryogenic temperatures owing to the extremely low surface resistance. Fixed frequency planar HTS resonator filters have been extensively studied [1]. Tunable filters capable of changing the resonator operation frequencies over a wide frequency range are useful for applications in flexible and reconfigurable systems. In the case of tunable HTS filters, several enabling techniques have been demonstrated, such as MEMS switched capacitors [2], nanomotor driven HTS coated tuners [3], and ferroelectric materials [4]. One common challenge is to minimise the degradation of the high Q-factors of the HTS circuits caused by introducing the tuning elements. Various successes have been achieved. Previously we investigated a silicon dielectric-tuner by integrating silicon MEMS actuators with HTS resonators [5,6]. A comb-drive actuated horizontal tuner was first demonstrated in [5]. Later a rocking vertical actuator was reported showing improved tunability and reliability [6]. In both cases, at 77 K, the Q-factors of the HTS resonators were significantly reduced by the resistance of the silicon used (about 20 V . cm based on four-point-probe measurement at room temperature). In this Letter, temperature-dependent cryogenic behaviour of the rocking actuator is studied, this is of interest because temperature affects the carrier density [7] in the silicon, and therefore alters the level of power dissipation and Q-factor of the resonator.

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Silicon comb-drive actuators for low-temperature tuning of superconducting microwave circuits

Cited by 5 publications

References 14 publications

Tuning of a superconducting microwave resonator at 77 K using an integrated micromachined silicon vertical actuator

Tuning of a superconducting microwave resonator at 77 K using an integrated micromachined silicon vertical actuator

Fully adaptable band‐stop filter using varactor diodes

Cryogenic performance of micromachined silicon rocking actuator for tuning a superconducting resonator

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