Modern MEMS gyros are widely used nowadays, however, the field of high dynamic moving objects is still hardly accessible for them because of rigid requirements for the sensors to be shock resistant. Solid state gyros (SSG), namely, those that are based on surface acoustic waves (SAW), are likely to become the solution to this problem. This paper provides a short introduction to theory of SAW based SSGs and a brief overview of the existing design concepts, which are described, analyzed, and compared with each other. The main advantages, problems, and prospects for further development of SAW based SSGs are discussed.
Originally, sensors based on surface acoustic waves are fabricated using photolithography, which becomes extremely expensive when a small series or even single elements are needed for the research. A laser thin film local evaporation technique is proposed to substitute the photolithography process in the production of surface acoustic wave based inertial sensors prototypes. To estimate its potential a prototype of a surface acoustic wave gyroscope sensing element was fabricated and tested. Its was shown that the frequency mismatch is no more than 1%, but dispersion of the wave on small inertial masses leads to a spurious parasitic signal on receiving electrodes. Possible ways of its neglecting is discussed.
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