State of the art and prospects for the development of SAW-based solid-state gyros

Abstract

Modern MEMS gyros are widely used nowadays, however, the field of high dynamic moving objects is still hardly accessible for them because of rigid requirements for the sensors to be shock resistant. Solid state gyros (SSG), namely, those that are based on surface acoustic waves (SAW), are likely to become the solution to this problem. This paper provides a short introduction to theory of SAW based SSGs and a brief overview of the existing design concepts, which are described, analyzed, and compared with each other. The main advantages, problems, and prospects for further development of SAW based SSGs are discussed.

Development of wireless, batteryfree gyroscope based on one-port SAW delay line and double resonant antenna

“…The propagating SAW on the substrate generates heat due to acoustic energy scatterings that occur when the wave collides with lattices [24]. This heat may cause an elongation of the substrate and a decrease in the SAW velocity, resulting in a wavelength change of the SAW and a downshift of the center frequency [25][26][27]. When 1 mW of RF power was applied, a small amount of heat was observed.…”

Localized laser vaporization of films with complex topologies for surface acoustic wave microgyroscope sensor

“…Создание поверхностной топологии осуществлялось путем локального лазерного испарения с ис-пользованием в качестве оборудования системы прецизионной лазерной маркировки (СПЛМ) «Мини-Маркер 2», основные характеристики которой представлены в таблице [14]. …”

Enhancing the mechanical resistance of micromechanical gyros

“…Almost all available MEMS gyros remain operational in fre quency band up to 1 kHz, some samples retain their metrological characteristics under vibrations up to 2 kHz, while survival is guaranteed under vibrations up to 5 kHz [7,8]. According to the references, solid state gyros on surface acoustic waves are the most resistant, however, their development is still at the stage of laboratory investigations [9]. While analyzing the gyro metrological performance, in some cases, we should only know which acceleration amplitudes pro vide negligibly small additional errors, and in other cases, we focus on maintaining the performance and recovery time after the external effect.…”