Localized laser vaporization of films with complex topologies for surface acoustic wave microgyroscope sensor

Safronov, Daniil; Popov, Pavel D.

doi:10.17586/2226-1494-2018-18-2-191-196

Naučno-teh. vestn. inf. tehnol. meh. opt.

2018

DOI: 10.17586/2226-1494-2018-18-2-191-196

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Localized laser vaporization of films with complex topologies for surface acoustic wave microgyroscope sensor

Daniil Safronov¹,

Pavel D. Popov²

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Localized laser vaporization of films with complex topologies for surface acoustic wave microgyroscope sensor

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References 6 publications

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