Formation of a Complex Topologies of SAW-Based Inertial Sensors by Laser Thin Film Local Evaporation

Kukaev, Alexander S.; Lukyanov, Dmitry; Mikhailenko, Denis A.; Safronov, Daniil; Shevchenko, Sergey; Venediktov, Vladimir Yu.; Vlasov, A. Yu.

doi:10.3390/mi12010010

Cited by 3 publications

(2 citation statements)

References 19 publications

(24 reference statements)

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Also, the photolithography technology has been successfully applied to the fabrication of bioinspired mechanosensors, but the complexity of the whole process needs further reduction for enhancing the yield rate of bioinspired sensors. [ 316 ] The unique design of local micro/nanoscale region is important for the function of the mechanosensory structure. A common problem while summarizing recent preparation methods is the absence of simultaneously multiscale ultraprecision technology for manufacturing bioinspired sensors whose key dimensions span from the nanoscale to the macroscale.…”

Section: Future Perspectives and Concluding Remarksmentioning

confidence: 99%

Engineered Mechanosensors Inspired by Biological Mechanosensilla

Qian

Fan

Gui

et al. 2021

Adv Materials Technologies

View full text Add to dashboard Cite

Bionic engineering provides a promising way for promoting the development of science and technology. Next‐generation diversified mechanosensors that can efficiently sense four types of mechanical signals, including tactile, vibration, air/water flow, and sound, are also benefiting from the bioinspired approach. Natural organisms have evolved sophisticated biological mechanosensilla with excellent performance, such as ultrahigh sensitivity, resolution, stability, anti‐interference, and miniaturization, providing a great deal of inspiration for urgently needed mechanosensors that are difficult to achieve through conventional methods. Here, the recent advances in biological mechanosensilla and corresponding bioinspired mechanosensors are reviewed in detail. According to the classification of the mechanosensilla, i.e., tactile sensilla, vibrational sensilla, flow sensilla, and acoustic sensilla, this review is mainly divided into four parts. In each part, the research on functional mechanisms of the mechanosensilla based on well‐organized mechanosensory micro/nanostructures and unique functional materials, as well as the bionic design strategy and preparative technique of bioinspired mechanosensors are individually summarized and discussed. Meanwhile, insight into the further efforts in comprehensive understanding of the mechanosensilla, learning from the multiperformance integration of sensilla, and establishing the efficient preparation methods for bioinspired mechanosensors is provided, all of which are needed to be addressed urgently before having bioinspired mechanosensors of practical value.

show abstract

Section: Future Perspectives and Concluding Remarksmentioning

confidence: 99%

Engineered Mechanosensors Inspired by Biological Mechanosensilla

Qian

Fan

Gui

et al. 2021

Adv Materials Technologies

View full text Add to dashboard Cite

show abstract

“…Surface acoustic wave (SAW) accelerometer is another promising MEMS based accelerometer that uses SAWs generated on piezoelectric crystals, and the changes of acceleration result in significant shifts of its resonant frequencies [12]. Such SAW accelerometer has advantages of miniaturization, high precision and sensitivity, with digital output capability facilitating transmission of information with computers [13][14][15][16]. More importantly, due to its working frequency in the radio-frequency (RF) range, SAW accelerometers are currently the only accelerometer which is capable of wireless and passive detection [17,18].…”

Section: Introductionmentioning

confidence: 99%

Versatile and effective design platform for surface acoustic wave accelerometers

et al. 2023

View full text Add to dashboard Cite

Micro-Electro-Mechanical Systems (MEMS) accelerometers have great potentials for applications in aerospace, autonomous driving and consumer electronics. However, most of their working principles are based on capacitive and resistance types, which cannot be easily used for wireless and passive sensing, while surface acoustic waves (SAWs) are the key solution for this problem. Due to complex acoustic-electric-mechanical coupling during accelerator operations, currently, there needs an accurate, reliable, and efficient design and simulation platform to improve the structure and performance of SAW based accelerometers. In this work, we proposed an accurate, reliable, and efficient modeling platform to optimize designs of SAW accelerometers, using a double-ended cantilever beam structure as an example. This model integrated elastic acoustic effect and the coupled wave equations under both the mechanical and electrical loading using the finite element analysis, and obtained acceleration-frequency responses of the accelerators. We have systematically simulated effects of thickness of piezoelectric film, wavelengths, and structural parameters of cantilever beams, and the simulation results are well consistent with the theoretical results. Finally, using the developed model, we designed a high-G SAW accelerometer (up to 20000 g), which achieved a high sensitivity (-41.8 Hz/g) and excellent linearity (0.9999), and another high sensitivity accelerometer (3.02 KHz/g), with a good linearity (0.9999) over a 100 g acceleration range.

show abstract