Bionic engineering provides a promising way for promoting the development of science and technology. Next‐generation diversified mechanosensors that can efficiently sense four types of mechanical signals, including tactile, vibration, air/water flow, and sound, are also benefiting from the bioinspired approach. Natural organisms have evolved sophisticated biological mechanosensilla with excellent performance, such as ultrahigh sensitivity, resolution, stability, anti‐interference, and miniaturization, providing a great deal of inspiration for urgently needed mechanosensors that are difficult to achieve through conventional methods. Here, the recent advances in biological mechanosensilla and corresponding bioinspired mechanosensors are reviewed in detail. According to the classification of the mechanosensilla, i.e., tactile sensilla, vibrational sensilla, flow sensilla, and acoustic sensilla, this review is mainly divided into four parts. In each part, the research on functional mechanisms of the mechanosensilla based on well‐organized mechanosensory micro/nanostructures and unique functional materials, as well as the bionic design strategy and preparative technique of bioinspired mechanosensors are individually summarized and discussed. Meanwhile, insight into the further efforts in comprehensive understanding of the mechanosensilla, learning from the multiperformance integration of sensilla, and establishing the efficient preparation methods for bioinspired mechanosensors is provided, all of which are needed to be addressed urgently before having bioinspired mechanosensors of practical value.

Internal mechanosensors, as the core component of a proprioceptive system, provide vital mechanical information from intelligent devices for adaptive motor control, mechanical fault diagnosis, and machining condition monitoring. However, developing a sophisticated mechanosensory structure that can be widely used is highly desirable to significantly improve the detection performance of internal mechanosensors. Coincidentally, in nature, optimized microscale slits of arachnids (e.g., scorpions and spiders) are ingeniously used as a mechanosensory structure for internal mechanosensilla to efficiently detect the inevitable internal mechanical feedbacks caused by self‐motion and external mechanical stimuli. Biological slit‐based mechano‐sensilla provide an attractive bio‐inspired strategy to use the controllable slit as the sensory structure to improve the perceptual performance of internal mechanosensors. In this study, the structure‐deformation‐performance coupling relationship of slit‐based mechano‐sensilla is explored through experiment and theoretical analysis. An artificial slit‐based mechanosensor is developed by mimicking the combined deformation properties of the slit and the ultrathin cuticular membrane covering the slit tail. This bio‐inspired mechanosensor shows excellent performance in terms of mechanical stability, response time, and sensitivity to mechanical signals. The research on a practical application highlights the importance of the unique basic “design” principles of the slit‐based mechano‐sensilla in improving the proprioceptive capability of smart engineering devices.

Internal mechano-sensors, as an indispensable part of the proprioceptive system of intelligent equipment, have attracted enormous research interest because of their extremely crucial role in monitoring machining processes, real-time diagnosis of equipment faults, adaptive motor control and so on. The mechano-sensory structure with signal-transduction function is an important factor in determining the sensing performance of a mechano-sensor. However, contrary to the wide application of the cantilever beam as the sensory structure of external mechano-sensors in order to guarantee their exteroceptive ability, there is still a lack of an effective and widely used sensory structure to significantly improve the sensing performance of internal mechano-sensors. Here, inspired by the scorpion using the specialized slit as the sensory structure of internal mechano-sensilla, the slit is ingeniously used in the design of the engineered internal mechano-sensor. In order to improve the deformability of the slit wake, the hollowed-out design around the slit tail of biological mechano-sensilla is researched. Meanwhile, to mimic the easily deformed flexible cuticular membrane covering the slit, the ultrathin, flexible, crack-based strain sensor is used as the sensing element to cover the controllable slit wake. Based on the coupling deformation of the slit wake, as well as the flexible strain sensor, the slit-based mechano-sensor shows excellent sensing performance to various mechanical signals such as displacement and vibration signals.

In engineering, cracks are typically regarded as defects due to enormous stress amplification at tip of the crack. Conversely, scorpion ingeniously utilizes the “risky” near-tip stress field of a crack-shaped slit to accurately detect weak vibration signal without causing catastrophic crack propagation from the slit tip. The present paper focuses on the balance strategy between structural safety and sensing accuracy of slit-based mechanical sensilla. We performed a detailed structural and mechanical property study of tissue around the slit wake utilizing a complementary combination of various experimental methods. The results indicate that there is a special thin surface membrane covering the slit wake and the elastic moduli of the membrane and exoskeleton are 0.562 GPa and 5.829 GPa, respectively. In addition, the ratio of bending stiffness between exoskeleton and membrane tissue is about 8 × 104. The theoretical and simulation analysis show that the surface membrane—with appropriate elastic modulus and bending stiffness—can achieve different forms of deformation with the change of slit width for protecting the mechanosensory structure without sacrificing the sensing accuracy. This finding offers a crucial theoretical basis for the further design of bionic mechanical sensors based on the near-tip stress field of artificial cracks.