We suggest a concept design of a SAW-based microaccelerometer with an original triangular-shaped console-type sensing element. Our design is particularly optimized to increase the robustness against positioning errors of the SAW resonators on the opposite sides of the console. We also describe the results of computer simulations and laboratory tests that are in a perfect agreement with each other and present the sensitivity characteristics of a manufactured experimental design device.

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The paper considers the construction of a piezoelectric accelerometer capable of measuring constant linear acceleration. A number of designs are proposed that make it possible to achieve high sensitivity with small dimensions and a wide frequency band (from 10−5 Hz). The finite element model of the proposed design was investigated, and its output characteristic and scale factor (36 mV/g) were obtained.

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Modern MEMS gyros are widely used nowadays, however, the field of high dynamic moving objects is still hardly accessible for them because of rigid requirements for the sensors to be shock resistant. Solid state gyros (SSG), namely, those that are based on surface acoustic waves (SAW), are likely to become the solution to this problem. This paper provides a short introduction to theory of SAW based SSGs and a brief overview of the existing design concepts, which are described, analyzed, and compared with each other. The main advantages, problems, and prospects for further development of SAW based SSGs are discussed.