Microaccelerometer based on surface acoustic waves

Lukyanov, Dmitry; Shevchenko, Sergey; Kukaev, Alexander S.; Filippova, E. O.; Safronov, Daniil

doi:10.1109/spawda.2014.6998515

Cited by 8 publications

(8 citation statements)

References 1 publication

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“…Triangular-shaped console design is a solution that provides the equal bending resistance. The equation that relates the variable width of the console with the longitudinal coordinate and relevant expressions for internal stresses σ( x ) as well as relative deformations ε( x ) is given by [ 12 ].

…”

Section: Resultsmentioning

confidence: 99%

“…Figure 5 shows that the triangular-shaped console provides a significant increase of the uniformity of the distribution of the relative deformations on its opposite surfaces indicated by a prolonged plateau on the relative deformations plot (see Figure 5 b) that is sufficient to accommodate a SAW resonator taking into account the available manufacturing accuracy [ 12 , 20 ].…”

Section: Resultsmentioning

confidence: 99%

“…Generally, they utilize discrete elastic suspensions that provide the necessary degrees of freedom for inertial masses that, in turn, require that the microoscillating system is installed with a high precision of 0.1–1 μm. These conditions reduce both the vibrostability and the shock resistance of SMAs while requiring high-tech manufacturing technology [ 12 ].…”

Section: Introductionmentioning

confidence: 99%

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Surface-Acoustic-Wave Sensor Design for Acceleration Measurement

Shevchenko

Kukaev

Khivrich

et al. 2018

Sensors

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We suggest a concept design of a SAW-based microaccelerometer with an original triangular-shaped console-type sensing element. Our design is particularly optimized to increase the robustness against positioning errors of the SAW resonators on the opposite sides of the console. We also describe the results of computer simulations and laboratory tests that are in a perfect agreement with each other and present the sensitivity characteristics of a manufactured experimental design device.

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…”

Section: Resultsmentioning

confidence: 99%

Section: Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Surface-Acoustic-Wave Sensor Design for Acceleration Measurement

Shevchenko

Kukaev

Khivrich

et al. 2018

Sensors

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“…Very recently [12] we have suggested a SAW-based MMA design based on a ring-type SE to overcome the disadvantages of rectangular [13,14] and triangular shaped SEs [15] due to more even 2 of 13 load distribution over the SE surface. In this current study we extend our previous findings towards (i) the optimization of the SE-attachment in the housing, (ii) finding the best material for the perspective SE design according to its frequency characteristics as well as (iii) estimation of the potential impact of the external influences such as excessive acceleration and temperatures on the SE assessed by computer simulations using the COMSOL Multiphysics software package.…”

Section: Introductionmentioning

confidence: 99%

Comparison of AlN vs. SIO2/LiNbO3 Membranes as Sensitive Elements for the SAW-Based Acceleration Measurement: Overcoming the Anisotropy Effects

Shevchenko

Mikhailenko

Markelov

2020

Sensors

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We propose the use of aluminum nitride (AlN) membranes acting as sensitive elements for the surface acoustic wave (SAW)-based acceleration measurement. The proposed solution is compared against existing prototypes based on the use of quartz (SiO2)/lithium niobate (LiNbO3) membranes that are characterized by extensive anisotropic properties. Using COMSOL Multiphysics 5.4 computer simulations we show explicitly that sensitive elements based on less anisotropic AlN membranes overcome both the low sensitivity limitations of SiO2 and low temperature stability of LiNbO3. Moreover, AlN membranes exhibit nearly double the robustness against irreversible mechanical deformations when compared against SiO2, which in turn allows for further 1.5-fold sensitivity enhancement over LiNbO3 based sensors. Taking into account their acceptable frequency characteristics, we thus believe that the AlN membranes are a good candidate forsensitive elements especially for high acceleration measurements.

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“…Issues considered in recent literature include the choice of the sensitive element material [6,8,9], and the possibility of passive implementation with a wireless interface [10][11][12]. Acceleration measurements represent a prominent application possibility [13], where the proposed class of solutions has the potential to develop serial devices characterized by enhanced robustness and the implementation of high-G values, as indicated by a series of recent publications [14][15][16][17], including some developments by our research team [18,19].…”

Section: Introductionmentioning

confidence: 99%

Ring-Shaped Sensitive Element Design for Acceleration Measurements: Overcoming the Limitations of Angular-Shaped Sensors

2019

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A new modification of an acceleration measurement sensor based on an acoustic waves resonance principle is proposed. Common angular-shaped sensors exhibit stress concentrations at the angular points near the origin points of destruction under external stresses; these points are the "Achilles' heel" of the entire design. To overcome the above limitation, we suggest an angular-free ring-shaped sensitive element design that is characterized by enhanced robustness against external stress. The analytical treatment is validated by computer simulation results performed using the COMSOL Multiphysics software package. For an appropriate model parameterization, an original experiment has been carried out to estimate the stress-strained robustness of two potential candidates for sensitive console materials. Moreover, characteristics of the proposed sensor design, such as sensitivity threshold and maximum stress, have been obtained from the simulation data. The above results indicate that the proposed concept offers a promising advancement in surface acoustic waves (SAW) based accelerometer devices, and could, therefore, be used for several practical applications in such areas as biomedical and sports wearable devices; vehicular design, including unmanned solutions; and industrial robotics, especially those where high-G forces are expected.

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Microaccelerometer based on surface acoustic waves

Cited by 8 publications

References 1 publication

Surface-Acoustic-Wave Sensor Design for Acceleration Measurement

Surface-Acoustic-Wave Sensor Design for Acceleration Measurement

Comparison of AlN vs. SIO2/LiNbO3 Membranes as Sensitive Elements for the SAW-Based Acceleration Measurement: Overcoming the Anisotropy Effects

Ring-Shaped Sensitive Element Design for Acceleration Measurements: Overcoming the Limitations of Angular-Shaped Sensors

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