Surface-Acoustic-Wave Sensor Design for Acceleration Measurement

Shevchenko, Sergey; Kukaev, Alexander S.; Khivrich, M.; Lukyanov, Dmitry

doi:10.3390/s18072301

Cited by 21 publications

(13 citation statements)

References 23 publications

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“…Very recently [12] we have suggested a SAW-based MMA design based on a ring-type SE to overcome the disadvantages of rectangular [13,14] and triangular shaped SEs [15] due to more even 2 of 13 load distribution over the SE surface. In this current study we extend our previous findings towards (i) the optimization of the SE-attachment in the housing, (ii) finding the best material for the perspective SE design according to its frequency characteristics as well as (iii) estimation of the potential impact of the external influences such as excessive acceleration and temperatures on the SE assessed by computer simulations using the COMSOL Multiphysics software package.…”

Section: Introductionmentioning

confidence: 99%

Comparison of AlN vs. SIO2/LiNbO3 Membranes as Sensitive Elements for the SAW-Based Acceleration Measurement: Overcoming the Anisotropy Effects

Shevchenko

Mikhailenko

Markelov

2020

Sensors

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We propose the use of aluminum nitride (AlN) membranes acting as sensitive elements for the surface acoustic wave (SAW)-based acceleration measurement. The proposed solution is compared against existing prototypes based on the use of quartz (SiO2)/lithium niobate (LiNbO3) membranes that are characterized by extensive anisotropic properties. Using COMSOL Multiphysics 5.4 computer simulations we show explicitly that sensitive elements based on less anisotropic AlN membranes overcome both the low sensitivity limitations of SiO2 and low temperature stability of LiNbO3. Moreover, AlN membranes exhibit nearly double the robustness against irreversible mechanical deformations when compared against SiO2, which in turn allows for further 1.5-fold sensitivity enhancement over LiNbO3 based sensors. Taking into account their acceptable frequency characteristics, we thus believe that the AlN membranes are a good candidate forsensitive elements especially for high acceleration measurements.

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Section: Introductionmentioning

confidence: 99%

Comparison of AlN vs. SIO2/LiNbO3 Membranes as Sensitive Elements for the SAW-Based Acceleration Measurement: Overcoming the Anisotropy Effects

Shevchenko

Mikhailenko

Markelov

2020

Sensors

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“…One of promising ideas in this area is the use of solid-state microgyroscopes on bulk [ 2 ] and surface acoustic waves (SAW), which are based on the molecular kinetics of a solid body. Today, such sensors are being actively developed [ 3 , 4 , 5 , 6 , 7 , 8 , 9 , 10 , 11 , 12 , 13 , 14 , 15 ]. At the same time, the technology of manufacturing a sensitive SAW gyroscope has its own difficulties, due to the need to manufacture a complex electrode topology.…”

Section: Introductionmentioning

confidence: 99%

Formation of a Complex Topologies of SAW-Based Inertial Sensors by Laser Thin Film Local Evaporation

et al. 2020

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Originally, sensors based on surface acoustic waves are fabricated using photolithography, which becomes extremely expensive when a small series or even single elements are needed for the research. A laser thin film local evaporation technique is proposed to substitute the photolithography process in the production of surface acoustic wave based inertial sensors prototypes. To estimate its potential a prototype of a surface acoustic wave gyroscope sensing element was fabricated and tested. Its was shown that the frequency mismatch is no more than 1%, but dispersion of the wave on small inertial masses leads to a spurious parasitic signal on receiving electrodes. Possible ways of its neglecting is discussed.

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“…That is the reason why interest in the research of the features of acoustic waves propagation under rotation and its use for motion parameter sensors development has increased in recent decades. Such studies have been carried out both for surface (SAW) and bulk (BAW) acoustic waves [ 2 , 3 , 4 , 5 , 6 , 7 , 8 , 9 , 10 ].…”

Section: Introductionmentioning

confidence: 99%

The Sensitive Element of Acoustic Sensor on Circular Polarized Waves: From Theoretical Considerations towards Perspective Rotation Rate Sensors Design

Shevelko

Lutovinov

Peregudov

et al. 2020

Sensors

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In this paper, the perspectives of using the features of acoustic wave propagation to design rotation rate sensors (RRS) are discussed. The possibility of developing the solid-state sensitive elements (SE) of RRS on acoustic waves of circular polarization is shown. The theoretical basis of bulk acoustic wave propagation under rotation is given. The direct excitation of circularly polarized acoustic wave (CPAW) is considered, the design of the CPAW emitting transducer is offered. The results of experimental studies that indicated the circular nature of the particle motions in the radiated wave are discussed. The principally new concept of the RRS SE design on CPAW, being able to operate under high vibration and acceleration, is proposed. The experimental results revealed a high correlation with theoretical and numerical predictions and confirmed RRS on CPAW operability.

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Surface-Acoustic-Wave Sensor Design for Acceleration Measurement

Cited by 21 publications

References 23 publications

Comparison of AlN vs. SIO2/LiNbO3 Membranes as Sensitive Elements for the SAW-Based Acceleration Measurement: Overcoming the Anisotropy Effects

Comparison of AlN vs. SIO2/LiNbO3 Membranes as Sensitive Elements for the SAW-Based Acceleration Measurement: Overcoming the Anisotropy Effects

Formation of a Complex Topologies of SAW-Based Inertial Sensors by Laser Thin Film Local Evaporation

The Sensitive Element of Acoustic Sensor on Circular Polarized Waves: From Theoretical Considerations towards Perspective Rotation Rate Sensors Design

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