Ring-Shaped Sensitive Element Design for Acceleration Measurements: Overcoming the Limitations of Angular-Shaped Sensors

Abstract

A new modification of an acceleration measurement sensor based on an acoustic waves resonance principle is proposed. Common angular-shaped sensors exhibit stress concentrations at the angular points near the origin points of destruction under external stresses; these points are the "Achilles' heel" of the entire design. To overcome the above limitation, we suggest an angular-free ring-shaped sensitive element design that is characterized by enhanced robustness against external stress. The analytical treatment is validated by computer simulation results performed using the COMSOL Multiphysics software package. For an appropriate model parameterization, an original experiment has been carried out to estimate the stress-strained robustness of two potential candidates for sensitive console materials. Moreover, characteristics of the proposed sensor design, such as sensitivity threshold and maximum stress, have been obtained from the simulation data. The above results indicate that the proposed concept offers a promising advancement in surface acoustic waves (SAW) based accelerometer devices, and could, therefore, be used for several practical applications in such areas as biomedical and sports wearable devices; vehicular design, including unmanned solutions; and industrial robotics, especially those where high-G forces are expected.

Highly Sensitive Signal Processing Devices for Capacitive Transducers of Micromechanical Accelerometers

“…To increase sensitivity and thermal stability of frequency-based SPD, the differential principle of output frequency synthesis is conventionally used [2,19]. This principle is schematically shown in Figure 2.…”

“…Present-day micromechanical accelerometers are widely used in different types of transport and electronic means from aerospace, water and auto transport systems to mobile phones and new generation video game consoles [1][2][3][4][5][6]. There are many kinds of transducers in present micromechanical accelerometers, such as capacitive, piezo-resistive, electromagnetic, optical, thermal convective, acoustic waves resonant, field emission, tunnel transducers and so on [6].…”

Comparison of AlN vs. SIO2/LiNbO3 Membranes as Sensitive Elements for the SAW-Based Acceleration Measurement: Overcoming the Anisotropy Effects

“…Very recently [12] we have suggested a SAW-based MMA design based on a ring-type SE to overcome the disadvantages of rectangular [13,14] and triangular shaped SEs [15] due to more even 2 of 13 load distribution over the SE surface. In this current study we extend our previous findings towards (i) the optimization of the SE-attachment in the housing, (ii) finding the best material for the perspective SE design according to its frequency characteristics as well as (iii) estimation of the potential impact of the external influences such as excessive acceleration and temperatures on the SE assessed by computer simulations using the COMSOL Multiphysics software package.…”

The Effect of a Rotating Medium on Bulk Acoustic Wave Polarization: From Theoretical Considerations to Perspective Angular Motion Sensor Design

“…The propagation of acoustic waves in solid media is not only of theoretical interest, but also practical application, for example, in the development of SE for prospective solid-state AMS based on both surface and bulk acoustic wave effects [1][2][3][4][5][6][7][8][9]. The study of the physics underlying BAW propagation under motion rotation conditions dates back to the 1960s.…”