Surface acoustic wave accelerometer for high-G applications

Lukyanov, Dmitry; Shevchenko, Sergey; Kukaev, Alexander S.; Khivrich, M.

doi:10.1109/ultsym.2015.0462

Cited by 4 publications

(6 citation statements)

References 2 publications

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“…The keynote advantage of the SAW-based accelerometers is the absence of any moving parts in their design, which could potentially make them extremely shock, vibration and temperature resistant. Recent literature data based solely on the results of computer simulations predict potential values up to several-dozen g [ 23 , 24 ], while no experimental confirmation has been provided. Although rather simple physical models describing the SAW accelerometer dynamics do not limit their shock or vibrational resistance, we understand that most likely the limiting factors would come from secondary effects such as fabrication precision, potential sensor element asymmetry, inhomogeneity of raw materials and so on.…”

Section: Discussionmentioning

confidence: 99%

Surface-Acoustic-Wave Sensor Design for Acceleration Measurement

Shevchenko

Kukaev

Khivrich

et al. 2018

Sensors

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We suggest a concept design of a SAW-based microaccelerometer with an original triangular-shaped console-type sensing element. Our design is particularly optimized to increase the robustness against positioning errors of the SAW resonators on the opposite sides of the console. We also describe the results of computer simulations and laboratory tests that are in a perfect agreement with each other and present the sensitivity characteristics of a manufactured experimental design device.

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Section: Discussionmentioning

confidence: 99%

Surface-Acoustic-Wave Sensor Design for Acceleration Measurement

Shevchenko

Kukaev

Khivrich

et al. 2018

Sensors

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“…In 2015, Wang et al designed a SAW accelerometer based on ST-X quartz cantilever beam and achieved a frequency sensitivity of 29.7 kHz g −1 , a good linearity and a lower detection limit of ∼1 × 10 −4 g [20]. In 2015, Lukyanov et al designed a differential SAW accelerometer with two SAW-resonators placed to the opposite sides of the console, aiming to achieve high vibration and shock resistances, and finite element analysis predicted a measurement range of 50 ∼ 65 000 g and a sensitivity of only 0.2 Hz g −1 [21]. In 2018, Shevchenko et al developed another SAW accelerometer with a high sensitivity of about 14.62 kHz g −1 but with a poor detection range of only ±2 g [14].…”

Section: Introductionmentioning

confidence: 99%

Versatile and effective design platform for surface acoustic wave accelerometers

et al. 2023

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Micro-Electro-Mechanical Systems (MEMS) accelerometers have great potentials for applications in aerospace, autonomous driving and consumer electronics. However, most of their working principles are based on capacitive and resistance types, which cannot be easily used for wireless and passive sensing, while surface acoustic waves (SAWs) are the key solution for this problem. Due to complex acoustic-electric-mechanical coupling during accelerator operations, currently, there needs an accurate, reliable, and efficient design and simulation platform to improve the structure and performance of SAW based accelerometers. In this work, we proposed an accurate, reliable, and efficient modeling platform to optimize designs of SAW accelerometers, using a double-ended cantilever beam structure as an example. This model integrated elastic acoustic effect and the coupled wave equations under both the mechanical and electrical loading using the finite element analysis, and obtained acceleration-frequency responses of the accelerators. We have systematically simulated effects of thickness of piezoelectric film, wavelengths, and structural parameters of cantilever beams, and the simulation results are well consistent with the theoretical results. Finally, using the developed model, we designed a high-G SAW accelerometer (up to 20000 g), which achieved a high sensitivity (-41.8 Hz/g) and excellent linearity (0.9999), and another high sensitivity accelerometer (3.02 KHz/g), with a good linearity (0.9999) over a 100 g acceleration range.

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“…In 2015, they further developed a SAW acceleration sensor incorporating ST-X quartz cantilever beam, achieving a high sensitivity up to 29.7 kHz g −1 , with a good linearity and a high resolution [12]. In 2015, Lukyanov et al and designed the console of SAW accelerometer, making it able to survive extreme impact (50 g ∼ 65,000 g) with a sensitivity of 0.2 Hz g −1 [13]. In 2020, Shevchenko et al proposed a novel sensitive element using aluminum nitride membrane for acceleration measurement, and achieved a sensitivity of 43 Hz g −1 [14].…”

Section: Introductionmentioning

confidence: 99%

Equal-strength beam design of acoustic wave accelerometers

Zhao,

Zhou,

Kuang

et al. 2023

Phys. Scr.

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Surface acoustic wave (SAW) based accelerometers have received significant attention due to their digital output, low cost, mass production and easy implementation of wireless passive function. However, conventionally triangular cantilever-beam based SAW accelerometers often have non-uniform strains generated along the beams, which cause emergence of parasitic wave modes and measurement errors. In this paper, a simulation platform was developed to analyze and optimize designs of SAW accelerometers and variable-thickness and equal-strength beams were designed to solve the critical issue of non-uniform strain distribution along the beam. Frequency responses of SAW accelerometers under the acceleration were successfully obtained using the simulation platform, with the visualized strain/stress distribution and particle displacement field. The accuracy of this simulation platform was verified using the experimental result reported in literature. A highly sensitive and equal-strength beam SAW accelerometer was achieved with a sensitivity up to 1.40 kHz/g, a linearity coefficient of ~1, and a measurement range of 0~15 g. Furthermore, a high-G accelerometer was designed, with the capability of enduring large shocks up to 11,500 g and a sensitivity of 6.96 Hz/g.

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Surface acoustic wave accelerometer for high-G applications

Cited by 4 publications

References 2 publications

Surface-Acoustic-Wave Sensor Design for Acceleration Measurement

Surface-Acoustic-Wave Sensor Design for Acceleration Measurement

Versatile and effective design platform for surface acoustic wave accelerometers

Equal-strength beam design of acoustic wave accelerometers

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