Physical programming (PP) is an emerging multiobjective and design optimizationmethod that has been applied successfully in diverse areas of engineering and operations research. The application of PP calls for the designer to express preferences by de ning ranges of differing degrees of desirability for each design metric. Although this approach works well in practice, it has never been shown that the resulting optimal solution is not unduly sensitive to these numerical range de nitions. PP is shown to be numerically well conditioned, and its sensitivity to designer input (with respect to optimal solution) is compared with that of other popular methods. The important proof is provided that all solutions obtained through PP are Pareto optimal and the notion of Pareto optimality is extended to one of pragmaticimplication.The important notion of P dominancethat extends the concept of Pareto optimality beyond the cases minimize and maximize is introduced. P dominance is shown to lead to the important concept of generalized Pareto optimality. Numerical results are provided that illustrate the favorable numerical properties of physical programming.
Physical programming (PP) is a new multiobjective and design optimization method that has been applied successfully in diverse areas of engineering and operations research. The application of PP calls for the designer to express his/her preferences by defining ranges of differing degrees of desirability for each design metric. Although this approach works well in practice, it had never been shown that the optimal solution is not unduly sensitive to these numerical range definitions. This paper shows that PP is indeed numerically well conditioned, and also compares its sensitivity to designer input (with respect to optimal solution) with that of other popular methods. This paper also provides the important proof that all solutions obtained through PP are Pareto optimal, and extends the notion of Pareto optimality to one of pragmatic implication. This paper introduces the important notion of P-Dominance that extends the concept of Pareto optimality beyond the cases minimize and maximize. We show that P-Dominance leads to the important concept of Generalized Pareto Optimal@. Numerical results arc provided, which illustrate the favorable numerical properties of physical programming.
We discuss the integration of process simulations for several process steps in the fabrication of a simple Damascene structure. Starting with a blanket silicon dioxide substrate and a patterned mask, we perform simulations of plasma etching, PVD barrier deposition, PVD seed layer deposition, electrochemical deposition of copper using an additive-containing bath, and chemical mechanical polishing. This virtual process sequence demonstrates the use of process simulation to study not just individual process steps, but process flows. After using 2d features and 3d/2d simulations to calibrate models for a particular process, we present samples of fully 3d/3d simulations to show possible approaches to answering questions that cannot be addressed by 2D simulators, such as deposition into dual Damascene structure and the plasma etching of porous materials.
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