We demonstrate a top-down fabricated reconfigurable field effect transistor (RFET) based on a silicon nanowire that can be electrostatically programmed to pand n-configuration. The device unites a high symmetry of transfer characteristics, high on/off current ratios in both configurations and superior current densities in comparison to other top-down fabricated RFETs. Two NiSi2/Si Schottky junctions are formed inside the wire and gated individually. The narrow omega-gated channel is fabricated by a repeated SiO2 etch and growth sequence and a conformal TiN deposition. The gate and Schottky contact metal work functions and the oxide-induced compressive stress to the Schottky junction are adjusted to result in only factor 1.6 higher p-than n-current for in absolute terms identical gate voltages and identical drain voltages.

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We present an integrated microfluidic system developed based on semiconductor and flat panel display compatible technology to facilitate mass manufacturability of next generation Lab-on-Chip systems. Tailored to different dynamic specifications, two semiconductor grade polymers are selected and used for device fabrication. Compared with PDMS based approach, the selected polymers and optimized excimer laser-aided transferring technique serve as the key factors to enable multi-step and high controllable diagnostic point-of-care platforms with integrated electrical and optical detection schemes.