Integrated Active Microfluidics using Flat Panel Display Technology with Two Different Semiconductor Grade Polymers

Abstract

We present an integrated microfluidic system developed based on semiconductor and flat panel display compatible technology to facilitate mass manufacturability of next generation Lab-on-Chip systems. Tailored to different dynamic specifications, two semiconductor grade polymers are selected and used for device fabrication. Compared with PDMS based approach, the selected polymers and optimized excimer laser-aided transferring technique serve as the key factors to enable multi-step and high controllable diagnostic point-of-care platforms with integrated electrical and optical detection schemes.