The 5.2M transistor UItraSPARC(TM)-I microprocessor is manufactured using the 0.5um EPIC3 CMOS QLM process. Design features were implemented to accelerate increases in manufacturing yield and product performance while enabling rapid establishment of high-coverage manufacturing test. Support for production memory defect mapping and repair, scan-based testing and failure analysis, component identity tracking, Iddq testing, per-chip CMOS process parameter monitoring, and aggressive process scalability were included. In implementing these features, our goal was to build a foundation for automatic and continuous identification of bottlenecks in performance of the overall microprocessor manufacturing process.
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