Wafer-based nanostructure manufacturing for integrated nanooptic devices

Wang, J.J.; Chen, Lei; Tai, Stephen; Deng, Xuegong; Sciortino, P.F.; Deng, Jiandong; Liu, Feng

doi:10.1109/jlt.2004.842298

Cited by 36 publications

(40 citation statements)

References 15 publications

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“…After this, a silicon nitride waveguide core layer of ϳ450 nm thickness was grown on by PECVD as well. A UV-nanoimprint lithography [14][15][16][17] was utilized to pattern the top subwavelength grating. A grating mold of 900 nm period was used in the UV-nanoimprint process.…”

Section: A Fabrication Of a Resonant Grating Filter Sensormentioning

confidence: 99%

Resonant grating filters as refractive index sensors for chemical and biological detections

Wang

Chen

Kwan

et al. 2005

Journal of Vacuum Science &Amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

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A chemical and biological sensor based on a free-space waveguide resonant grating optical filter has been developed. Different from the conventional surface plasmon resonance sensors and the conventional waveguide mode sensors, which require either prism coupling or grating coupling, the proposed free-space optical sensor device does not require special separate coupling. The inherent 100% coupling efficiency at resonance can significantly boost probe efficiency. Both simulation and experimental results have demonstrated that the sensor could deliver a resolution of better than 0.001–0.0001 for refractive index sensing, which is enough for detecting various chemical and biological materials. More importantly, under an angular detection scheme, the proposed waveguide resonant grating sensor could be one order’s more sensitive than the conventional surface plasmon resonance sensor.

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Section: A Fabrication Of a Resonant Grating Filter Sensormentioning

confidence: 99%

Resonant grating filters as refractive index sensors for chemical and biological detections

Wang

Chen

Kwan

et al. 2005

Journal of Vacuum Science &Amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

View full text Add to dashboard Cite

show abstract

“…In the past three years, we have processed more than 1,000 4-inch-in-diameter wafers for nano-optic polarizers and waveplates by using the nanomanufacturing technology described in this paper, which is based on nanoreplication and nanolithography [28,30]. Statistically, we have achieved wafer throughput of 15 wafers (4 inches in diameter) per hour by means of nanoreplication.…”

Section: Wafer-based Optical Nanostructure Manufacturingmentioning

confidence: 99%

Free-space nano-optical devices and integration: Design, fabrication, and manufacturing

et al. 2005

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“…Park et al [13] provided a new silane chemistry route to improve antisticking properties of Ni stamps for nanoimprint lithography. Wang et al [14] presented a nanomanufacturing platform based on wafer-level nanoreplication with nanolithographic mold and nanopattern transfer. The surface of their mold was also treated with FDTS SAMs.…”

Section: Introductionmentioning

confidence: 99%

Anti-adhesive effects of diverse self-assembled monolayers in nanoimprint lithography

Shen

Chuang

et al. 2007

Sensors and Actuators A: Physical

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Wafer-based nanostructure manufacturing for integrated nanooptic devices

Cited by 36 publications

References 15 publications

Resonant grating filters as refractive index sensors for chemical and biological detections

Resonant grating filters as refractive index sensors for chemical and biological detections

Free-space nano-optical devices and integration: Design, fabrication, and manufacturing

Anti-adhesive effects of diverse self-assembled monolayers in nanoimprint lithography

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