Free-space nano-optical devices and integration: Design, fabrication, and manufacturing

Wang, Jim J.; Deng, Xuegong; Chen, Lei; Sciortino, P.F.; Liu, Feng; Tai, Stephen; Liu, Xiaoming; Nikolov, Anguel; Weinbaum, Barry J.

doi:10.1002/bltj.20107

Cited by 4 publications

(2 citation statements)

References 26 publications

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“…The structure induced birefringence has been utilized to make phase plates at visible and near-infrared (NIR) wavelengths [1][2][3]. Air channels have been routinely used as the lower index media in the gratings.…”

Section: Subwavelength Grating As Phase Platesmentioning

confidence: 99%

“…We demonstrated efficient fabrication of large-area grating structures that function as high performance zero-order single-wave quarter wave plates (QWPs) at 785 nm and 650 nm [1,2], the dual-wavelength QWPs for combined CD/DVD read/write head, and achromatic wave plates at 650-800 nm [3]. Here we present multilayer planarized subwavelength microstructures suitable for mass production.…”

Section: Introductionmentioning

confidence: 99%

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Composite microstructures for optical data storage

et al. 2007

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We design and fabricate polarization-dependent components (PDCs) based on all-dielectric, fully planarized, multilayer microstructures of 150 nm period by using low-loss materials. Quarter-wave and half-wave phase plates at 405 nm are presented. Wafer-level retardation within +/-7deg of the targets and wavefront distortion at 10mm-aperture <20mλ rms are achieved. We also discussed the reliability of various composite microstructures. Stress-test up to 2000 hours at 85 o C and 85% relative humidity confirmed that even air-channeled microstructures surpass very stringent reliability requirements. Multifunction integrated diffractive PDCs are discussed.

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Section: Subwavelength Grating As Phase Platesmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%