Anti-adhesive effects of diverse self-assembled monolayers in nanoimprint lithography

Wu, Chih Wei; Shen, Yung Kang; Chuang, S.Y.; Wei, C. M.

doi:10.1016/j.sna.2006.10.017

Cited by 23 publications

(9 citation statements)

References 21 publications

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“…Each imprint was performed by step-and-repeat thermal NIL and the followed process parameters are detailed later in this paragraph. Four different commercial anti-adhesion materials were tested: OctadecylTrichloroSilane (OTS) [ 25 ] from Sigma-Aldrich (Schnelldorf, Germany), 1,1,2,2-tetrahydrooctylTriChloroSilane (F13-TCS) [ 26 ] from ABCR (Karlsruhe, Germany), Optool™ DSX from Daikin Chemical Europe (Düsseldorf, Germany) and Fluorolink ® S10 [ 27 ] from Solvay Specialty Polymers (Bollate, Italy). The process deposition of each material can be found in the respective reference.…”

Section: Resultsmentioning

confidence: 99%

Integrated 3D Hydrogel Waveguide Out-Coupler by Step-and-Repeat Thermal Nanoimprint Lithography: A Promising Sensor Device for Water and pH

Francone

Kehoe

Obieta

et al. 2018

Sensors

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Hydrogel materials offer many advantages for chemical and biological sensoring due to their response to a small change in their environment with a related change in volume. Several designs have been outlined in the literature in the specific field of hydrogel-based optical sensors, reporting a large number of steps for their fabrication. In this work we present a three-dimensional, hydrogel-based sensor the structure of which is fabricated in a single step using thermal nanoimprint lithography. The sensor is based on a waveguide with a grating readout section. A specific hydrogel formulation, based on a combination of PEGDMA (Poly(Ethylene Glycol DiMethAcrylate)), NIPAAm (N-IsoPropylAcrylAmide), and AA (Acrylic Acid), was developed. This stimulus-responsive hydrogel is sensitive to pH and to water. Moreover, the hydrogel has been modified to be suitable for fabrication by thermal nanoimprint lithography. Once stimulated, the hydrogel-based sensor changes its topography, which is characterised physically by AFM and SEM, and optically using a specific optical set-up.

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Section: Resultsmentioning

confidence: 99%

Integrated 3D Hydrogel Waveguide Out-Coupler by Step-and-Repeat Thermal Nanoimprint Lithography: A Promising Sensor Device for Water and pH

Francone

Kehoe

Obieta

et al. 2018

Sensors

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“…Usually, an anti-sticking thin functional layer is applied on the mold to reduce the surface energy and suppress adhesion between the mold and the resist. Self-assembled monolayer of CF 3 (CF 2 ) 7 (CH 2 ) 2 SiC l3 (FDTS), deposited on the oxidized Si mold surface, is used as the antiadhesive agent [10].…”

Section: Resultsmentioning

confidence: 99%

Electrowetting display pixels fabricated by nanoimprint lithography

Di¹,

Zhang²,

Liang³

et al. 2015

Proceedings of the 2015 International Conference on Applied Science and Engineering Innovation

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Abstract. Electrowetting displays (EWD) is a novel technology, based on the variation in coverage of a colored oil film in pixels via application of an electrostatic force. These pixels are usually fabricated by photolithography, which seriously limits materials selection and large area fabrication. In this paper, we demonstrate the feasibility of a novel method, nanoimprint lithography (NIL), to fabricate EWD pixels. Controllable contraction and recovery of oil film in single EWD pixels was realized. Compared with conventional lithography, NIL provides a cost-and time-saving technique that generates comparable display properties and is able to be easily extended to the mass production.

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“…Self-assembled monolayers such as CH 3 (CH 2 ) 17 SiCl 3 (OTS) and CF 3 (CF 2 ) 7 (CH 2 ) 2 SiCl 3 (FDTS) are adopted as an anti-adhesive layer to increase the lifetime of the mold. This anti-adhesive monolayer may be the best choice for high-temperature nanoimprinting (Wu et al, 2007).…”

Section: Key Concern For Nil Templates 331 Template Surface Treatmentmentioning

confidence: 99%

Nanoimprint Lithography

Lan¹,

Ding²

2010

Lithography

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Anti-adhesive effects of diverse self-assembled monolayers in nanoimprint lithography

Cited by 23 publications

References 21 publications

Integrated 3D Hydrogel Waveguide Out-Coupler by Step-and-Repeat Thermal Nanoimprint Lithography: A Promising Sensor Device for Water and pH

Integrated 3D Hydrogel Waveguide Out-Coupler by Step-and-Repeat Thermal Nanoimprint Lithography: A Promising Sensor Device for Water and pH

Electrowetting display pixels fabricated by nanoimprint lithography

Nanoimprint Lithography

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