2009
DOI: 10.1109/mdt.2009.125
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Test Challenges for 3D Integrated Circuits

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Cited by 268 publications
(35 citation statements)
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“…Tester probe access for wafers is significantly more challenging in 3D chips than in 2D chips due to structures such as micro-bumps, which are too small, too dense and too numerous. New defects emerge for 3D chips due to processing steps that did not exist in 2D chips, e.g., wafer thinning, alignment and bonding [100]. Micro-bumps in 3D chips are susceptible to open/bridging defects [101].…”
Section: From 2d To 3d Chip Testingmentioning
confidence: 99%
“…Tester probe access for wafers is significantly more challenging in 3D chips than in 2D chips due to structures such as micro-bumps, which are too small, too dense and too numerous. New defects emerge for 3D chips due to processing steps that did not exist in 2D chips, e.g., wafer thinning, alignment and bonding [100]. Micro-bumps in 3D chips are susceptible to open/bridging defects [101].…”
Section: From 2d To 3d Chip Testingmentioning
confidence: 99%
“…The ICs are fabricated by stacking dies that are connected with Through Silicon Vias (TSVs) and micro solder bumps [2].…”
Section: Introductionmentioning
confidence: 99%
“…In comparison to testing of 2D ICs, 3D SICs introduce many new challenges for testing. The testing of 3D ICs has been considered as the number one challenge in research in 2009 [16]. Several researchers are still concentrating to make a breakthrough in this area [17]- [27].…”
Section: Introductionmentioning
confidence: 99%