System for inducing and characterizing electron beam-induced surface reactions at pressures up to 10−4 Torr

Abstract

A system for studying electron-induced surface reactions at pressures up to 10−4 Torr has been constructed. It uses the electron source of a single pass cylindrical mirror electron energy analyzer to both stimulate surface reactions and to analyze, by Auger electron spectroscopy, the surface changes brought about by those reactions. The centerpiece of the design is a small separately pumped fixed position chamber lying within the main vacuum chamber. From below, sample surfaces are brought into this chamber through a Viton-sealed opening and are positioned at the focal plane of the Auger analyzer using a rotatable z-motion manipulator. During electron-induced surface reactions at elevated pressures, the hot filament of the electron source is protected via a small 0.5-mm-diam aperture between the electron source operating at 10−8 Torr and the reaction cell operating at ∼10−4 Torr. In a second configuration, selected after the reaction cell has been pumped out, a larger aperture suitable for collecting Auger electrons is used. The sample is mounted on a rotatable off-axis stage that allows several different irradiation experiments for a single sample preparation. Test results for e-beam induced carbon deposition and etching are presented.

Electron-beam induced initial growth of platinum films using Pt(PF3)4

“…9 The e-beam induced surface reactions were carried out in a vacuum system (2 ϫ10 Ϫ9 Torr base pressure͒ equipped with an Auger spectrometer ͑Perkin-Elmer 10-155͒ with an internal e-beam source that was used for both EBID and Auger electron spectroscopy ͑AES͒. 9 The e-beam induced surface reactions were carried out in a vacuum system (2 ϫ10 Ϫ9 Torr base pressure͒ equipped with an Auger spectrometer ͑Perkin-Elmer 10-155͒ with an internal e-beam source that was used for both EBID and Auger electron spectroscopy ͑AES͒.…”