Swastika Hole shaped Phononic Crystal for Quality enhancement of Contour Mode Resonators

Workie, Temesgen Bailie; Liu, Jiacheng; Wu, Zhaohui; Tang, Panliang; Bao, Jingfu; Hashimoto, Ken-ya

doi:10.1109/iws52775.2021.9499380

Cited by 7 publications

(6 citation statements)

References 4 publications

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“…Furthermore, The FBAR quality factor is a dimensionless quantity that represents the resonator's underdamped performance and expressed the correlation between the resonator bandwidth and its center frequency [279,280]. On other hand, the quality factor is well known and defined as the ratio of the energy stored in the resonator to the energy dissipated for each electromechanical conversion cycle [281,282], as presented in Eq. ( 8):…”

Section: Film Bulk Acoustic Resonatormentioning

confidence: 99%

A review of piezoelectric MEMS sensors and actuators for gas detection application

et al. 2023

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Piezoelectric microelectromechanical system (piezo-MEMS)-based mass sensors including the piezoelectric microcantilevers, surface acoustic waves (SAW), quartz crystal microbalance (QCM), piezoelectric micromachined ultrasonic transducer (PMUT), and film bulk acoustic wave resonators (FBAR) are highlighted as suitable candidates for highly sensitive gas detection application. This paper presents the piezo-MEMS gas sensors’ characteristics such as their miniaturized structure, the capability of integration with readout circuit, and fabrication feasibility using multiuser technologies. The development of the piezoelectric MEMS gas sensors is investigated for the application of low-level concentration gas molecules detection. In this work, the various types of gas sensors based on piezoelectricity are investigated extensively including their operating principle, besides their material parameters as well as the critical design parameters, the device structures, and their sensing materials including the polymers, carbon, metal–organic framework, and graphene.

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Section: Film Bulk Acoustic Resonatormentioning

confidence: 99%

A review of piezoelectric MEMS sensors and actuators for gas detection application

et al. 2023

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“…The outer radius of the circular frame is 107 μm while the inner radius is 74.5 μm, the frame and the thickness are 32.5μm, as shown in Figure 6, a. The resonant frequency (fr) can be calculated using the formula [38][39][40]:…”

Section: Resonator Designmentioning

confidence: 99%

Enhancement of The Quality Factor of Thin-Film-Piezoelectric-on-Si MEMS Resonator Using Phononic Crystals and Circular Suspended Frame Structure

Awad,

Workie,

Hashimoto

et al. 2023

Preprint

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This paper reports enhancing the anchor quality factor of a thin-film-piezoelectric-on-silicon MEMS resonator using a combination of energy-preserving suspended circular frame and Aisha-phononic crystals. The circular frame work as a mechanical vibration isolator among the anchors and resonator body, at the same time Aisha-PnC prohibits the acoustic wave from escaping to anchors by generating a bandgap. The results show circular frame structure with Aisha-PnC resonator lowers insertion loss from 4.1 dB to 0.2 dB, improves anchor quality factor from 14,215 to 74,141 and Q unloaded from 3,732 to 161,086 achieving 5.3-fold and 43-fold enhancements respectively.

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“…Even though it is reported to provide significant improvement in Q, it introduces spurious modes near the intended resonance mode. The most widely used method is to apply one-dimensional or two-dimensional phononic crystals on anchors of the resonator or on supporting tethers, which is provided by many researchers [18][19][20]. Different types of effective phononic crystals have been achieved so far.…”

Section: Introductionmentioning

confidence: 99%

Reem-Shape Phononic Crystal for Q anchor enhancement of TPoS MEMS Resonator

Awad¹,

Workie²,

Bao³

et al. 2023

Preprint

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: This paper proposes a reem-shape phononic crystal for the performance enhancement of TPoS resonators. The proposed phononic crystal offers an ultra-wide acoustic band gap that prevents energy leakage through the supporting substrate on its placement at the anchoring boundary, resulting in significant improvements in the resonator quality factor. Simulated results show reem-shape Phononic crystals generate a band gap up to 175MHz with BG of 90% and enhance the anchor quality factor from 180,000 to 6,000,000 and unloaded quality factor from 133,000 to 160,000 representing 33.3-fold and 1.2-fold improvements respectively.

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Swastika Hole shaped Phononic Crystal for Quality enhancement of Contour Mode Resonators

Cited by 7 publications

References 4 publications

A review of piezoelectric MEMS sensors and actuators for gas detection application

A review of piezoelectric MEMS sensors and actuators for gas detection application

Enhancement of The Quality Factor of Thin-Film-Piezoelectric-on-Si MEMS Resonator Using Phononic Crystals and Circular Suspended Frame Structure

Reem-Shape Phononic Crystal for Q anchor enhancement of TPoS MEMS Resonator

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