Enhancement of The Quality Factor of Thin-Film-Piezoelectric-on-Si MEMS Resonator Using Phononic Crystals and Circular Suspended Frame Structure
Mohammed Awad,
Temesgen Bailie Workie,
Ken-ya Hashimoto
et al.
Abstract:This paper reports enhancing the anchor quality factor of a thin-film-piezoelectric-on-silicon MEMS resonator using a combination of energy-preserving suspended circular frame and Aisha-phononic crystals. The circular frame work as a mechanical vibration isolator among the anchors and resonator body, at the same time Aisha-PnC prohibits the acoustic wave from escaping to anchors by generating a bandgap. The results show circular frame structure with Aisha-PnC resonator lowers insertion loss from 4.1 dB to 0.2 … Show more
Set email alert for when this publication receives citations?
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.