Reem-Shape Phononic Crystal for Q anchor enhancement of TPoS MEMS Resonator

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This article presents a new design of supporting tethers through the concept of force distribution. The transmitted force applied on tethers will be distributed on the new tether design area, resulting in low acoustic energy transferred to anchor boundaries and stored energy enhancement. This technique achieves an anchor quality factor of 175,000 compared to 58,000 obtained from the conventional tether design, representing a three-fold enhancement. Furthermore, the unloaded quality factor of the proposed design improved from 23,750 to 27,442, representing a 1.2-fold improvement.

Nonconventional Tether Structure for Quality Factor Enhancement of Thin-Film-Piezoelectric-on-Si MEMS Resonator

Awad,

Workie,

Bao

et al. 2023

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Quality Factor Improvement of a Thin-Film Piezoelectric-on-Silicon Resonator Using a Radial Alternating Material Phononic Crystal

Zhu,

Su,

Workie

et al. 2023

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This paper studies the radial alternating material phononic crystal (RAM-PnC). By simulating the band gap structure of the phononic crystal, a complete acoustic band gap was verified at the resonant frequency of 175.14 MHz, which can prevent the propagation of elastic waves in a specific direction. The proposed alternately arranged radial phononic crystal structure is applied to the thin-film piezoelectric-on-silicon (TPOS) MEMS resonator. The finite element simulation method increases the anchor quality factor (Qanchor) from 60,596 to 659,536,011 at the operating frequency of 175.14 MHz, which is about 10,000 times higher. The motion resistance of the RAM-PnC resonator is reduced from 156.25 Ω to 48.31 Ω compared with the traditional resonator. At the same time, the insertion loss of the RAM-PnC resonator is reduced by 1.1 dB compared with the traditional resonator.

Multi-Material Radial Phononic Crystals to Improve the Quality Factor of Piezoelectric MEMS Resonators

Yang,

Gao,

Zhu

et al. 2023

In this paper, a multi-material radial phononic crystal (M-RPC) structure is proposed to reduce the anchor-point loss of piezoelectric micro-electro-mechanical system (MEMS) resonators and improve their quality factor. Compared with single-material phononic crystal structures, an M-RPC structure can reduce the strength damage at the anchor point of a resonator due to the etching of the substrate. The dispersion curve and frequency transmission response of the M-RPC structure were calculated by applying the finite element method, and it was shown that the M-RPC structure was more likely to produce a band-gap range with strong attenuation compared with a single-material radial phononic crystal (S-RPC) structure. Then, the effects of different metal–silicon combinations on the band gap of the M-RPC structures were studied, and we found that the largest band-gap range was produced by a Pt and Si combination, and the range was 84.1–118.3 MHz. Finally, the M-RPC structure was applied to a piezoelectric MEMS resonator. The results showed that the anchor quality factor of the M-RPC resonator was increased by 33.5 times compared with a conventional resonator, and the insertion loss was reduced by 53.6%. In addition, the loaded and unloaded quality factors of the M-RPC resonator were improved by 75.7% and 235.0%, respectively, and at the same time, there was no effect on the electromechanical coupling coefficient.